표제지
목차
국문요약 10
Abstract 12
제1장 서론 14
제2장 이론적 배경 16
2-1. 이트리아(Y₂O₃)의 특성 17
2-1-1. 내플라즈마성 18
2-2. 이트리아 소결 18
제3장 실험 방법 19
2-2. 원재료 준비 19
제4장 실험결과 및 고찰 24
제5장 결론 43
참고문헌 44
Table 1. Various Yttria specimens used in this work. 19
Table 2. Fracture toughness and strength at various materials. 22
Figure 1. Crystal Structure of Yttria ceramics. 17
Figure 1. Schematic shows the Cold isostatic pressing (CIP) process. 20
Figure 3. Sintering schedule of the three-repeated cycle under an air atmosphere: GY, CY, and FY [11], 1700 ° C for 24 h and heating rate,... 23
Figure 4. DSC/TG Results of GY (Green Yttria). 25
Figure 5. XRD patterns of yttria ceramics sintered; (a) GY, green yttria, (b) CY, calcined yttria, (c) FY, fused yttria, and (d) HY [22], hot-pressed yttria. 27
Figure 6. Bulk density of yttria samples. 28
Figure 7. Optical photograph of polished surface of yttria ceramic sintered at 1700 ° C for 6 h in air; (a) CY, calcined yttria ceramic, (a') Calcination... 30
Figure 8. Phase diagram of yttrium-oxygen. 32
Figure 9. SEM images taken from (a) GY, (b) CY after thermal etching at 1250 ° C for 48 h under air atmosphere, (c) FY, (d) HY [22], fracture... 33
Figure 10. Vickers indents in sintered polycrystalline yttria ceramics of varying sinter method at 500 g load. Note the general tendency for both... 35
Figure 11. Young's modulus and KIC of yttria ceramics sintered by various methods. KIC from this study at 500 g loads, giving typical Vickers indent...[이미지참조] 37
Figure 12. Flexural strength and Hardness of yttria ceramics sintered by various methods; (a) Flexural strength and (b) Hardness from this study at... 39
Figure 13. Coverage of plasma-etched yttria ceramics vs. quartz, silicon, and ZrO₂; (a) Etch depth and rate. Etching time of Si-wafer(100) and quartz: 10... 41