To overcome the limited properties of PTFPMS and conventional rubber for harnessing versatile materials such as vehicles and spacecrafts, cyclosiloxane with methyl and vinyl groups was added. In this study, dimethyl carbonate (DMC), diethyl carbonate (DEC), and allyl methyl carbonate (AMC) were used as promoters in order to suppress back-biting reaction and FVMQ was successfully synthesized with them. 29Si NMR demonstrated that cyclic by-products from back-biting reaction were inhibited by adding carbonate materials and that the conversion of 1,3,5-trimethyl-1,3,5-tris(3,3,3-trifluoropropyl)cyclotrisiloxane (FD₃) also increased as the amount of promoter increased. Moreover, it was confirmed how the promoters affected the properties of FVMQs through ¹H NMR, DSC, and TGA. The intermediate of FVMQs was prepared in order to figure out the mechanism of suppressing back-biting by analyzing FT-IR, ¹H NMR and GPC. We foresee that controlled synthesis of FVMQs by inhibiting the production of cyclic by-products with promoters will have the crucial impact on polymer academia and vehicle industry demanding high yield of fluorosilicone copolymers.