Title Page
Abstract
Contents
Chapter 1. Introduction 15
1.1. Atomic hydrogen hypothesis 16
1.2. Theory of charged nanoparticles 18
1.3. Carbon allotropes 26
Chapter 2. Primary nanoparticles generated in the diamond HFCVD process 29
2.1. Introduction 30
2.2. Experiments 34
2.3. Results and Discussion 40
2.4. Conclusion 60
Chapter 3. Metastable nanocarbon allotropes in the initial stage of diamond growth at 300℃ 61
3.1. Introduction 62
3.2. Experiments 64
3.3. Results 71
3.4. Discussion 86
3.5. Conclusions 93
Chapter 4. Comparison of deposited diamonds according to the ratio of i-carbon and n-diamond 94
4.1. Introduction 95
4.2. Experiments 97
4.3. Results and Discussion 100
4.4. Conclusion 106
Bibliography 107
Abstract in Korean 117
Table 1-1. The rate of the hydrogen evolution reaction on a series of metals at the equilibrium potential 23
Table 2-1. D-spacing values of the small nanocarbon in Fig. 7(a), the large nanocarbon in Fig. 8(a) and i-carbon reported by Vora et al. 54
Table 3-1. Comparison of the experimentally observed d-spacing values with those reported for cubic diamond, n-diamond, hexagonal... 77
Figure 1-1. The CVD phase diagram of the C-H system under 2700 Pa. The graphite and diamond lines indicate the maximum solubility... 19
Figure 1-2. SEM images showing (a) diamond deposited on the silicon substrate and (b) graphitic soot deposited on the iron substrate at... 21
Figure 2-1. (a) Energy and (b) mass distributions of negatively charged carbon clusters extracted from the hot filament reactor. 32
Figure 2-2. An HRTEM image of the cluster with the diamond lattice, observed during the diamond oxyacetylene CVD process. 33
Figure 2-3. (a) Schematics of the HFCVD reactor with the capturing system and (b) the detail of the capturing system. 35
Figure 2-4. HRTEM images of the amorphous carbon layer and nanocarbons on a single layer graphene, which was (a) placed only... 41
Figure 2-5. HRTEM images of nanocarbons captured for 1 sec. (a) a small nanocarbon of~1 nm indicated by an arrow, (b) a... 43
Figure 2-6. HRTEM images of nanocarbons captured for 10 sec. (a) a small nanocarbon of~1 nm indicated by an arrow, (b) a... 45
Figure 2-7. STEM images of nanocarbons captured for (a) 1 s and (b) 10 s. 50
Figure 2-8. Distributions of the average size of nanocarbon particles captured at 1 s and 10 s. 52
Figure 2-9. (a) A small nanocarbon of 1.3 nm with an i-carbon lattice and (b) its FFT. 55
Figure 2-10. (a) A large nanocarbon of 3.6 nm with an i-carbon lattice with (b) its FFT. 56
Figure 3-1. HRTEM images of nanocarbon particles captured at (a) 1 s, (b) 10 s, (c) 30 s, (d) 120 s, and (e) 30 min. 72
Figure 3-2. HRTEM images of four nanocarbon allotropes of (a) i-carbon, (c) hexagonal diamond, (e) n-diamond, and (g) cubic... 75
Figure 3-3. (a) An HRTEM image of n-diamond nanoparticle. Magnified HRTEM images of the area of dashed squares (b), (d), and... 82
Figure 3-4. (a) An HRTEM image of a n-diamond nanoparticle. A magnified image of the area of the dashed square are shown in (b)... 83
Figure 3-5. (a) An HRTEM image of a i-carbon nanoparticle and (b) its FFT image. 85
Figure 3-6. Thermodynamic calculations of the CVD phase diagram of the C-H system at 20 torr by Thermo-Calc software using a... 87
Figure 4-1. Schematics of the HFCVD chamber with additional bias added 99
Figure 4-2. ~100 nanocarbon particles classification for each additional filament bias 101
Figure 4-3. SEM images of deposited diamond under the additional filament bias of (a) -100 V, (b) -50 V, (c) 0 V, and (d) +50 V. High... 102
Figure 4-4. Raman spectra of diamond particles deposited under the additional filament bias of (a) -100 V, (b) -50 V, (c) 0 V, and (d)+50 V 105