표제지
목차
국문요약 9
Abstract 10
제1장 서론 11
제2장 이론적 배경 13
2-1. AlN 재료 특성 및 제조방법 13
2-2. AlN 소결 16
2-3. AlN heater 18
2-4. 결정질과 비결정질 소재의 온도에 따른 부피 변화 거동 21
2-5. 초음파 탐상을 이용한 세라믹 내부 결함 검사 25
제3장 실험 방법 26
3-1. Al₂O₃-Y₂O₃-CaO 첨가제 제조 26
3-2. AlN 페이스트 및 기판 sealing 28
3-3. Al₂O₃-Y₂O₃-CaO 첨가제 및 AlN 접합 시편 분석 30
제4장 실험결과 및 고찰 31
4-1. Al₂O₃-Y₂O₃-CaO system 첨가제 물성 31
4-2. AlN 페이스트를 이용한 기판 접합 37
제5장 결론 50
참고문헌 51
Table 1. AlN powder manufacturing method 15
Table 2. Compositions of the powders investigated (mol%) and size 27
Table 3. The results of He leak test 42
Figure 1. Crystal structure of aluminum nitride. 14
Figure 2. SEM images of cross sections of AlN-Y₂O₃ sintered. 17
Figure 3. Semiconductor heater types and technology trends. 19
Figure 4. Semiconductor AlN heater manufacturing technology and process flow. 19
Figure 5. Schematic diagram of electrostatic chuck AlN Heater. 20
Figure 6. Schematic specific volume-temperature relations for liquids, glass, and crystal. 22
Figure 7. Schematic diagram of Amorphous behavior change with increasing temperature. 23
Figure 8. Typical cooling curves for (a) crystal and (b) non-crystal. 24
Figure 9. Schematic diagram of AlN substrate sealing. 29
Figure 10. SEM images of the prepared powder morphology: (a) AlYC1 and (b) AlYC2. 32
Figure 11. X-ray diffraction patterns of sintered Al₂O₃-Y₂O₃-CaO powders with the different composition. 34
Figure 12. DSC results for AlYC1, AlYC2 powders; the heating rate was 10 ℃/min. *Tpc: crystallization temperature and Toc: crystallization-onset. 36
Figure 13. SEM images of the interfaces between the AlN substrate sealing. The images in (a) and (c) correspond to sintered at 1750 ℃, while those in (b)... 38
Figure 14. Ultrasonic testing images of AlN substrate sealed using (a) AlN paste, (b) AlCY1 paste and (c) AlCY2 paste. 40
Figure 15. Cross-section SEM images of AlN substrate sealed using (a) AlN paste (b) AlCY1 paste, and (c) AlCY2 paste. 44
Figure 16. The EDS mapping analysis of sealed interface between AlN substrate using AlCY1 paste after sintering. 46
Figure 17. The EDS mapping analysis of sealed interface between AlN substrate using AlCY2 paste after sintering. 47
Figure 18. Thickness of AlN substrate interface as a function of paste and sintering temperature. 49