Title Page
Contents
Abstract 12
Chapter Ⅰ. Investigation of the ratio effect on the physicochemical properties of the molybdenum oxytelluride thin films 14
1.1. Introduction 14
1.2. Experimental Details 16
1.3. Results and Discussion 22
1.4. Conclusion 47
Chapter Ⅱ. Investigation of the temperature effect on the physicochemical properties of the molybdenum oxytelluride thin films 48
2.1. Introduction 48
2.2. Experimental Details 50
2.3. Results and Discussion 52
2.4. Conclusion 79
References 80
요약 94
Table 1.1. The applied RF power on the Mo and Te targets for TFs. 18
Table 1.2. The relative atomic percentage of MOT-X TFs calculated by EDX and XPS 23
Table 1.3. The SFE of MOT-X TFs calculated by modified Young's equation. 32
Table 2.1. The thickness of MOT55-YTFs. 56
Fig. 1.1. The deposition rate of (a) Mo and (b) Te TFs dependence on the applied RF sputter powers on targets. The inset equations are the deposition rate and applied RF... 17
Fig. 1.2. The thickness of MOT-X TFs measured by alpha step. 19
Fig. 1.3. The EDX spectra of MOT-X TFs having various compositional ratios. 24
Fig. 1.4. The SEM (x 200 k) images of MOT-X TFs; (a) MOT-0, (b) MOT-17, (c) MOT-40, (d) MOT-55, (e) MOT-80, and (f) MOT-100. The inset image is cross-... 26
Fig. 1.5. The AFM images of MOT-X TFs; (a) MOT-0, (b) MOT-17, (c) MOT-40, (d) MOT-55, (e) MOT-80, and (f) MOT-100. 28
Fig. 1.6. The CA images measured by dropping liquid on the surface of the MOT-X TFs; (a) DW and (b) EG. 30
Fig. 1.7. The tendency of CA of MOT-X TFs measured by using DW and EG and root mean square value of roughness measured by AFM. The inset image is a... 31
Fig. 1.8. The determined SFE of MOT-X TFs with various ratios. 32
Fig. 1.9. The XPS survey spectra of MOT-X TFs having various compositional ratios. 34
Fig. 1.10. (a) The high resolution XPS spectra for Mo 3d of MOT-X TFs. (b) The deconvoluted XPS spectra for Mo 3d of MOT-X TFs. 37
Fig. 1.11. (a) The high resolution XPS spectra for Te 3d of MOT-X TFs. (b) The deconvoluted XPS spectra for Te 3d₅/₂ of MOT-X TFs.[이미지참조] 38
Fig. 1.12. (a) The high resolution XPS spectra for O 1s of MOT-X TFs. (b) The deconvoluted XPS spectra for O 1s of MOT-X TF 39
Fig. 1.13. XRD patterns of MOT-40 and MOT-55 TFs. 41
Fig. 1.14. The UPS spectra for the region of secondary cutoff and Fermi level of MOT-X TFs. 43
Fig. 1.15. (a) The corrected secondary cutoff with respect to the Fermi level of MOT-X TFs. (b) The work function of MOT-X TFs measured by UPS and KP. 44
Fig. 1.16. The log scale value of electrical conductivity (σ) measured by the four-point probe vs. percentage of Te. 46
Fig. 2.1. The SEM images (x 30 k) of (a) MOT0-Y, (b) MOT17-Y, (c) MOT40-Y, (d) MOT55-Y, (e) MOT80-Y, and (f) MOT100-Y. Y represents the annealing temperature. 53
Fig. 2.2. The SEM images and EDX spectra of (a) MOT55-298, (b) MOT55-573, (c) MOT55-773, and (d) MOT55-973. 55
Fig. 2.3. The AFM images of (a) MOT0-Y, (b) MOT17-Y, (c) MOT40-Y, (d) MOT55-Y, (e) MOT80-Y, and (f) MOT100-Y. Y represents the annealing temperature. 58
Fig. 2.4. The XPS survey spectra of MOTX-Y TFs; (a) MOT0-Y, (b) MOT17-Y, (c) MOT40-Y, (d) MOT55-Y, (e) MOT80-Y, and (f) MOT100-Y. Y represents the annealing temperature. 60
Fig. 2.5. The deconvoluted XPS spectra for Mo 3d of MOTX-Y TFs; (a) MOT0-Y, (b) MOT17-Y, (c) MOT40-Y, (d) MOT55-Y, (e) MOT80-Y, and (f) MOT100-Y. Y represents the annealing temperature. 63
Fig. 2.6. Atomic ratio of Mo in the MOT TFs; (a) MOT0, (b) MOT17, (c) MOT40, (d) MOT55, and (e) MOT80. 64
Fig. 2.7. The deconvoluted XPS spectra for Te 3d₅/₂ of MOTX-Y TFs; (a) MOT0-Y, (b) MOT17-Y, (c) MOT40-Y, (d) MOT55-Y, (e) MOT80-Y, and (f) MOT100-Y. Y represents the annealing temperature.[이미지참조] 65
Fig. 2.8. Atomic ratio of Te in the MOT TFs; (a) MOT17, (b) MOT40, (c) MOT55, (d) MOT80, and (e) MOT100. 66
Fig. 2.9. The deconvoluted XPS spectra for Te 3d₅/₂ of MOTX-Y TFs; (a) MOT0-Y, (b) MOT17-Y, (c) MOT40-Y, (d) MOT55-Y, (e) MOT80-Y, and (f) MOT100-Y. Y represents the annealing temperature.[이미지참조] 67
Fig. 2.10. Atomic ratio of O in the MOT TFs; (a) MOT0, (b) MOT17, (c) MOT40, (d) MOT55, (e) MOT80, and (f) MOT100. 68
Fig. 2.11. The XRD pattern of MOTX-Y TFs; (a) MOT0-Y, (b) MOT17-Y, (c) MOT40-Y, (d) MOT55-Y, (e) MOT80-Y, and (f) MOT100-Y. Y represents the... 70
Fig. 2.12. The UPS spectra of (a) MOT0-298, (b) MOT17-298, (c) MOT40-298, (d) MOT55-298, (e) MOT80-298, and (f) MOT100-298. 72
Fig. 2.13. The UPS spectra of (a) MOT0-573, (b) MOT17-573, (c) MOT40-573, (d) MOT55-573, (e) MOT80-573, and (f) MOT100-573. 73
Fig. 2.14. The UPS spectra of (a) MOT0-773, (b) MOT17-773, (c) MOT40-773, (d) MOT55-773, (e) MOT80-773, and (f) MOT100-773. 74
Fig. 2.15. The UPS spectra of (a) MOT0-973, (b) MOT17-973, (c) MOT40-973, (d) MOT55-973, (e) MOT80-973, and (f) MOT100-973. 75
Fig. 2.16. The tendency of WF of MOTX-YTFs. 76
Fig. 2.17. The tendency of log scale value of electrical conductivity (σ) of MOTX-YTFs measured by the four-point probe. 78