표제지
요약
목차
1. 서론 12
1.1. 연구배경 12
1.2. 연구목적 14
2. 이론적 배경 15
2.1. 전자부품 제조업종 배출 대기오염물질 17
2.2. 주요 대기오염물질 특성 19
2.2.1. 대기오염물질 및 배출허용기준 19
2.2.2. 질소산화물 22
2.2.3. 황산화물 23
2.2.4. 불화수소 24
2.2.5. 염화수소 25
2.3. 온실가스 규제동향 26
2.3.1. 국내외 온실가스 규제현황 26
2.3.2. 전자부품 제조업종 온실가스 규제현황 27
2.3.3. F-gas 저감기술 동향 28
2.4. 미세먼지(질소산화물) 규제동향 30
2.4.1. 국내외 미세먼지 규제 현황 30
2.4.2. 전자부품 제조업종 미세먼지 규제현황 35
2.4.3. 질소산화물 저감기술 36
2.5. 전자부품 제조업종 대기오염물질 처리 38
2.5.1. 대기오염물질 전처리 38
2.5.2. 흡수에 의한 처리 40
2.5.3. 오존산화 및 환원 42
3. 연구방법 45
3.1. 질소산화물 저감 장치 45
3.2. 실험조건 및 오염물질 측정 48
3.3. SOx 발생 검증 실험 49
4. 결과 및 고찰 51
4.1. 오존 적정 주입량 55
4.1.1. 오존 주입량별 NO 산화 효율 55
4.1.2. 오존 주입량별 NO₂ 처리 효율 59
4.2. 질소산화물 처리형태 64
4.3. Na₂SO₃ 계열 환원제 적정 주입량 68
4.4. 환원제에 의한 부산물 70
4.5. 경제성 비교 및 저감 모델 73
4.5.1. 질소산화물 처리 형태별 경제성 73
4.5.2. 온실가스 및 질소산화물 동시 저감 모델 75
5. 결론 76
References 78
ABSTRACT 85
Table 2.1. Percentage of exports by industry 15
Table 2.2. Raw materials and air pollutants in the semiconductor industry 17
Table 2.3. Raw materials and air pollutants in the display(OLED) industry 18
Table 2.4. Types of air pollutants and permissible emission levels setting items 19
Table 2.5. Major countries' 2030 NDC plans 26
Table 2.6. GWP values of greenhouse gases 27
Table 2.7. Characteristics of F-gas decomposition technology 29
Table 2.8. Amendments to the air environmental standards 31
Table 2.9. Amendments to the indoor air quality control act 32
Table 2.10. Amendments to the special act on the improvement of air control in air control zones 33
Table 2.11. Types of POU scrubbers 38
Table 2.12. Types of wet scrubbers 41
Table 2.13. Characteristics of each type of reductant 44
Table 3.1. Specification of NOx reduction devices 47
Table 3.2. Experimental conditions of NOx reduction devices 48
Table 3.3. Analytical method 49
Table 4.1. Experimenatl results of NOx reduction devices (O₃/NO ratio 1.3~1.9) 52
Table 4.2. Experimenatl results of NOx reduction devices (O₃/NO ratio 2.2~3.9) 53
Table 4.3. SO₂ concentration by injection of reductant 72
Table 4.4. Operating expenses of NOx removal by ozone 73
Figure 3.1. Experimental schematic diagram of NOx reduction devices 47
Figure 4.1. Change of NO removal rate by injection of ozone 56
Figure 4.2. Change of NO removal rate by injection of ozone (NO 1,023 ppm, NOx 1,300 ppm) 58
Figure 4.3. Change of NO removal rate by injection of ozone (NO 586 ppm, NOx 879 ppm) 59
Figure 4.4. Change of NO₂ removal rate by injection of ozone 60
Figure 4.5. Change of NO₂ removal rate by injection of ozone (NO 1,023 ppm, NO₂ 277 ppm) 62
Figure 4.6. Change of NO₂ removal rate by injection of ozone (NO 586 ppm, NO₂ 293 ppm) 63
Figure 4.7. Change of NOx removal rate by injection of ozone 64
Figure 4.8. Change of NOx removal rate by injection of ozone (NO 1,023 ppm, NOx 1,300 ppm) 66
Figure 4.9. Change of NOx removal rate by injection of ozone (NO 586 ppm, NOx 879 ppm) 67
Figure 4.10. Change of NOx removal rate by injection of reductant (O₃/NO ratio 1.9) 69
Figure 4.11. Change of SO₂ concentration and NOx removal rate by injection of reductant (O₃/NO ratio 1.9) 71