표제지
목차
1. Introduction 10
2. Experimental 15
2.1. Materials 15
2.2. Analysis instrument 15
2.3. Preparation of Slurry 15
2.4. Stability test of slurry 17
2.5. Polishing experiments 17
3. Results and discussion 19
3.1. Characteristics of slurries by dispersant content 19
3.2. Results of initial physical property analysis of the slurry 22
3.3. Results of slurry stability properties 43
3.4. Polishing of slurries 49
4. Conclusion 52
References 53
Abstract 56
국문 요약 57
Table 1. Solid content results of slurries 21
Table 2. Result of size distribution by DLS 23
Table 3. Result of average angle by Contact Angle 27
Table 4. Results of pH, Conductivity 28
Table 5. Results of Zeta potential 33
Table 6. Results of Dry up test 35
Figure 1. Schematic of CMP process. 11
Figure 2. Three-components in ceria slurry. 12
Figure 3. Total potential energy between particles. 14
Figure 4. A schematic diagram of the effect of the stabilization of the adsorption layer. 16
Figure 5. Photo of polishing experiments using mini polisher. 18
Figure 6. Solid content results of CMP slurry. 20
Figure 7. Results of size distribution average by DLS. 24
Figure 8. Results of dispersibility by OM (X 400) (a) Commercial A, (b) Commercial B, (c) D104 - 5 wt%, (d) D104 - 6 wt%, and (e) D104 - 7 wt%. 25
Figure 9. Results of Contact Angle (a) Commercial A, (b) Commercial B, (c) D104 - 5 wt%, (d) D104 - 6 wt%, and (e) D104 - 7 wt%. 26
Figure 10. Results of Viscosity vs Shear rate (a) Commercial A, (b) Commercial B, (c) D104 - 5 wt%, (d) D104 - 6 wt%, and (e) D104 - 7 wt%. 30
Figure 11. Results of Shear stress vs Shear rate (a) Commercial A, (b) Commercial B, (c) D104 - 5 wt%, (d) D104 -6 wt%, and (e) D104 - 7 wt%. 31
Figure 12. Zeta results based on dispersant content. 32
Figure 13. Results of Dry up test (a) 1 hour after (b) 2 hours after (c) 3 hours after (d) 4 hours after and (e) 5 hours after. 34
Figure 14. Results of IR spectrum by ATR-IR (a) Commercial A, (b) Commercial B, (c) D104 - 5 wt%, (d) D104 - 6 wt%, and (e) D104 - 7 wt%. 37
Figure 15. Structure of Zinc salt of ethylene acrylic acid copolymer. 38
Figure 16. Results of GC-MS (a) Commercial A, (b) Commercial B, (c) D104 - 5 wt%, (d) D104 - 6 wt%, and (e) D104 - 7 wt%. 39
Figure 17. Structure of Tetrachloroethylene. 40
Figure 18. SEM images of Slurries (a) Commercial A, (b) Commercial B, (c) D104 - 5 wt%, (d) D104 - 6 wt%, and (e) D104 - 7 wt%. 41
Figure 19. TEM images of slurries (a) Commercial A, (b) Commercial B, (c) D104 - 5 wt%, (d) D104 - 6 wt%, and (e) D104 - 7 wt%. 42
Figure 20. Stability test results of slurries at 23 ℃ for 3 months (a) DLS, (b) pH, (c) Conductivity, and (d) Viscosity. 44
Figure 21. Stability test results of slurries at 23 ℃_open for 3 months (a) DLS, (b) pH, (c) Conductivity, and (d) Viscosity. 45
Figure 22. Stability test results of slurries at 4 ℃ for 3 months (a) DLS, (b) pH, (c) Conductivity, and (d) Viscosity. 46
Figure 23. Stability test results of slurries at 60 ℃ for 3 months (a) DLS, (b) pH, (c) Conductivity, and (d) Viscosity. 48
Figure 24. Remove rate results of CMP slurry. 50
Figure 25. Uniformity results of CMP slurry. 51