표제지
국문요약
Abstract
목차
제1장 서론 22
1.1. 연구배경 및 목적 22
1.2. 연구내용 및 구성 24
제2장 이론적 배경 25
2.1. Pd 도금 25
2.1.1. Pd 도금의 배경 25
2.1.2. Pd 도금 응용분야 26
2.2. 전해 도금법 27
2.2.1. 전해도금 27
2.2.2. 전류와 전위의 상관관계 28
2.3. 도금액 구성 첨가제 역할 31
2.3.1. 착화제 32
2.3.2. 도금액의 주요 구성성분 33
2.4. 합금도금 35
2.4.1. 합금도금의 배경 35
2.4.2. 합금도금 Mechanism 35
2.4.3. 합금도금 Anode 37
제3장 첨가제를 이용한 Ammonia-free Pd 도금 연구 38
3.1. 서론 38
3.2. 실험방법 41
3.2.1. 시편 준비 41
3.2.2. Ammonia-free Pd 도금액 조성 및 실험조건 43
3.2.3. Morphology 및 정성 분석 46
3.2.4. 상(Phase) 및 결정구조 분석 46
3.2.5. XPS 분석 47
3.2.6. 기계적 특성 및 내식성 시험 47
3.2.7. 전기전도도 측정 48
3.3. 결과 및 고찰 50
3.3.1. Ammonia-free Pd 도금의 착화제 선정 50
3.3.2. 첨가제에 따른 Ammonia-free Pd 도금의 Morphology 특성 58
3.3.3. 첨가제에 따른 Ammonia-free Pd 도금의 결정화 거동 67
3.3.4. 첨가제에 따른 Ammonia-free Pd 도금의 기계적 특성 73
3.3.5. 첨가제에 따른 Ammonia-free Pd 도금의 내부식성 76
3.3.6. 첨가제에 따른 Ammonia-free Pd 도금의 전기전도도 특성 79
3.4. 결론 84
References 86
제4장 Connector 접촉부 적용을 위한 Pd-Ni 합금도금 연구 90
4.1. 서론 90
4.2. 실험방법 92
4.2.1. Pd-Ni 합금도금액 조성 및 실험조건 92
4.2.2. Morphology 및 정성 분석 97
4.2.3. 상(Phase) 및 결정구조 분석 97
4.2.4. 기계적 특성 및 내식성 시험 98
4.3. 결과 및 고찰 99
4.3.1. 공정조건(온도,pH)에 따른 Pd-Ni 합금도금의 Morphology 특성 99
4.3.2. Pd-Ni 합금도금의 결정화 거동 116
4.3.3. 공정조건(온도,pH)에 따른 Pd-Ni 합금도금의 기계적 특성 평가 119
4.3.4. 공정조건(온도,pH)에 따른 Pd-Ni 합금도금의 표면저항 특성평가 126
4.3.5. Pd-Ni 합금도금의 내식성 특성 평가 129
4.4. 결론 131
References 133
제5장 MEMS probe tip 적용을 위한 Pd-Co 합금도금 연구 135
5.1. 서론 135
5.2. 실험방법 137
5.2.1. 시편 준비 137
5.2.2. Pd-Co 합금도금액 조성 및 실험조건 137
5.2.3. Morphology 및 정성 분석 140
5.2.4. 상(Phase) 및 결정구조 분석 140
5.2.5. XPS 분석 141
5.2.6. 기계적 특성 및 내식성 시험 141
5.2.7. 전기전도도 측정 142
5.3. 결과 및 고찰 143
5.3.1. 조성비의 따른 Pd-Co 합금도금의 Morphology 특성 143
5.3.2. 조성비에 따른 Pd-Co 합금도금의 결정화 거동 152
5.3.3. 조성비에 따른 Pd-Co 합금도금의 기계적 특성 평가 158
5.3.4. 조성비에 따른 Pd-Co 합금도금의 내부식성 161
5.3.5. 조성비에 따른 Pd-Co 합금도금의 전기전도도 특성 164
5.4. 결론 167
References 169
제6장 총괄 결론 171
Table. 2.0. Components of plating solution and role of function 31
Table. 3.1. The composition and procedure condition of Ammonia-free Pd electrolyte. 45
Table. 3.2. Stability constant of palladium complexes. 53
Table. 3.3. Composition and procedure condition of Ammonia type Pd solution. 54
Table. 3.4. The condition of Ammonia-free Pd solution(Ethylenediamine) 55
Table. 3.5. Roughness parameters including Ra and Rt value obtained from AFM. 64
Table. 3.6. Thickness of electrodeposited palladium in ammonia-free with various additives. 66
Table. 3.7. Test condition for Nano-Indentation test 74
Table. 3.8. Hardness values of bare metal(Cu) and electrodeposited palladium in ammonia-free with various additives. 74
Table. 3.9. Tafel analysis for bare metal(Cu) and electrodeposited palladium in ammonia-free with various additives. 78
Table. 3.10. Electrical conductivities of bare metal(Cu) and electrodeposited palladium in ammonia-free with various additives. 83
Table. 4.1. The composition and procedure condition of Pd-Ni alloy electrolyte with different temperatures. 95
Table. 4.2. The composition and procedure condition of Pd-Ni alloy electrolyte with different pH values. 96
Table. 4.3. Roughness parameters including Ra and Rt value obtained from AFM. 109
Table. 4.4. Roughness parameters including Ra and Rt value obtained from AFM. 111
Table. 4.5. Thickness of electrodeposited Pd-Ni with different temperatures. 113
Table. 4.6. Thickness of electrodeposited Pd-Ni with different pH values. 115
Table. 4.7. Test condition for Nano-Indentation test. 121
Table. 4.8. Hardness values of bare metal(Cu) and electrodeposited Pd-Ni with different temperatures. 121
Table. 4.9. Test condition for Nano-Indentation test. 123
Table. 4.10. Hardness values of bare metal(Cu) and electrodeposited Pd-Ni with different pH values. 123
Table. 4.11. Hardness values of hard Au and electrodeposited Pd-Ni with different composition ratio. 125
Table. 4.12. Surface resistance of electrodeposited Pd-Ni electrodeposited Pd-Ni with different temperatures. 127
Table. 4.13. surface resistance of electrodeposited Pd-Ni with different pH values. 128
Table. 4.14. Tafel analysis for bare metal(Cu) and Pd-Ni alloy plating. 130
Table. 5.1. The composition and procedure condition of Pd-Co alloy electrolyte. 139
Table. 5.2. Roughness parameters including Ra and Rt value obtained from AFM. 149
Table. 5.3. Thickness of electrodeposited Pd-Co with different composition ratio. 151
Table. 5.4. Test condition for Nano-Indentation test 159
Table. 5.5. Hardness values of bare metal(Cu) and electrodeposited Pd-Co with different composition ratio. 159
Table. 5.6. Tafel analysis for bare metal(Cu) and electrodeposited Pd-Co with different composition ratio. 163
Table. 5.7. Electrical conductivities of bare metal(Cu) and electrodeposited Pd-Co with different composition ratio. 166
Fig. 2.1. Oxidation/Reduction Reaction Formula. 27
Fig. 2.2. Potential versus current density curve 29
Fig. 3.1. Gold Price Movement Chart(10 Year) 40
Fig. 3.2. Appearance of experimental materials(Hullcell Copper) 42
Fig. 3.3. Flow chart of pre-treatment and Ammonia-free Pd plating on Hullcell copper. 44
Fig. 3.4. Schematic diagram of electrical conductivity test 49
Fig. 3.5. Surface morphology images of electrodeposited palladium ; (a) ammonia type Pd and (b) Ammonia-free Pd(Ethylenediamine). 56
Fig. 3.6. Cross-section morphology images of electrodeposited palladium ; (a) ammonia type Pd and (b) Ammonia-free... 57
Fig. 3.7. Surface morphology images of electrodeposited palladium in ammonia-free with various additives; (a) 3-pyridine... 60
Fig. 3.8. Morphology images and EDS analysis of electrodeposited palladium in ammonia-free with various additives; (a) 3-pyridine... 61
Fig. 3.9. EDS (at.%) graph of electrodeposited palladium in ammonia-free with various additives. 62
Fig. 3.10. Typical three-dimensional AFM image of electrodeposited palladium in ammonia-free with various additives; (a) 3-pyridine sulfonic... 63
Fig. 3.11. Roughness graph of electrodeposited palladium in ammonia-free with various additives 64
Fig. 3.12. Cross-section morphology images of electrodeposited palladium in ammonia-free with various additives; (a) 3-pyridine sulfonic... 65
Fig. 3.13. Thickness graph of electrodeposited palladium in ammonia-free with various additives. 66
Fig. 3.14. XRD analysis of electrodeposited palladium in ammonia-free with various additives; (a) bare metal(Cu), (b) 3-pyridine... 69
Fig. 3.15. XPS spectra of Pd3d for electrodeposited palladium with sodium nicotinate. 70
Fig. 3.16. XRD analysis of electrodeposited palladium with sodium nicotinate. 71
Fig. 3.17. TEM images of electrodeposited palladium with sodium nicotinate ; (a) HRTEM image, and (b) selected area electron... 72
Fig. 3.18. Hardness comparison of bare metal(Cu)and electrodeposited palladium in ammonia-free with various additives. 75
Fig. 3.19. Potentiodynamic curves of substrate and electrodeposited palladium in ammonia-free with various additives. 77
Fig. 3.20. Electrical conductivitiy graphs of electrodeposited palladium in ammonia-free with various additives; (a) bare metal(Cu) (b) 3-pyridine... 82
Fig. 3.21. Electrical conductivities graph of substrate and electrodeposited palladium in ammonia-free with various additives. 83
Fig. 4.1. Flow chart of pre-treatment and Pd-Ni alloy plating with different temperatures. 93
Fig. 4.2. Flow chart of pre-treatment and Pd-Ni alloy plating with different pH values. 94
Fig. 4.3. Surface morphology images o electrodeposited Pd-Ni with different temperatures; (a) 40℃, (b) 50℃, (c) 60℃ and (d) 70℃. 102
Fig. 4.4. Surface morphology images o electrodeposited Pd-Ni with different pH values; (a) 4.0 (b) 5.0, (c) 6.0 and (d) 7.0. 103
Fig. 4.5. Morphology images and EDS analysis of electrodeposited Pd-Ni with different temperatures; (a) 40℃, (b) 50℃, (c) 60℃... 104
Fig. 4.6. EDS (at.%) graph of electrodeposited Pd-Ni with different temperatures. 105
Fig. 4.7. Morphology images and EDS analysis of electrodeposited Pd-Ni with different temperatures; (a) 4.0 (b) 5.0, (c) 6.0 and (d) 7.0. 106
Fig. 4.8. EDS (at.%) graph of electrodeposited Pd-Ni Pd-Ni with different pH values. 107
Fig. 4.9. Typical three-dimensional AFM image of electrodeposited Pd-Ni with different temperatures; (a) 40℃, (b) 50℃, (c) 60℃ and (d) 70℃. 108
Fig. 4.10. Roughness graph of electrodeposited Pd-Ni with different temperatures. 109
Fig. 4.11. Typical three-dimensional AFM image of electrodeposited Pd-Ni with different pH values; (a) 4.0 (b) 5.0, (c) 6.0 and (d) 7.0. 110
Fig. 4.12. Roughness graph of electrodeposited Pd-Ni with different pH values. 111
Fig. 4.13. Cross-section morphology images of electrodeposited Pd-Ni with different temperatures; (a) 40℃, (b) 50℃, (c) 60℃... 112
Fig. 4.14. Thickness graph of electrodeposited Pd-Ni with different temperatures. 113
Fig. 4.15. Cross-section morphology images of electrodeposited Pd-Ni with different pH values; (a) 4.0 (b) 5.0, (c) 6.0 and (d) 7.0. 114
Fig. 4.16. Thickness graph of electrodeposited Pd-Ni with different pH values. 115
Fig. 4.17. XRD analysis of electrodeposited Pd-Ni; (a) bare metal(Cu) and (b) Pd-Ni layer. 117
Fig. 4.18. XPS spectra of Pd3d band and Ni2p band for electrodeposited Pd-Ni layer. 118
Fig. 4.19. Hardness comparison of bare metal(Cu) and electrodeposited Pd-Ni with different temperatures. 122
Fig. 4.20. Hardness comparison of bare metal(Cu) and electrodeposited Pd-Ni with different pH values. 124
Fig. 4.21. Hardness comparison of hard Au and electrodeposited Pd-Ni with different composition ratio. 125
Fig. 4.22. Surface resistance graph of electrodeposited Pd-Ni electrodeposited Pd-Ni with different temperatures. 127
Fig. 4.23. Surface resistance graph of electrodeposited Pd-Ni with different pH values. 128
Fig. 4.24. Potentiodynamic polarization curves of bare metal(Cu), Pd-Ni alloy plating. 130
Fig. 5.1. Flow chart of pre-treatment and Pd-Co alloy plating on Hullcell copper. 138
Fig. 5.2. Surface morphology images o electrodeposited Pd-Co with different composition ratio; (a) Pd 10 g/L : Co 1.0 g/L, (b) Pd 10... 145
Fig. 5.3. Morphology images and EDS analysis of electrodeposited Pd-Co with different composition ratio; (a) Pd 10 g/L : Co 1.0 g/L,... 146
Fig. 5.4. EDS (at.%) graph of electrodeposited Pd-Co with different composition ratio. 147
Fig. 5.5. Typical three-dimensional AFM image of electrodeposited Pd-Co with different composition ratio; (a) Pd 10 g/L : Co 1.0 g/L, (b) Pd 10... 148
Fig. 5.6. Roughness graph of electrodeposited Pd-Co with different composition ratio. 149
Fig. 5.7. Cross-section morphology images of electrodeposited Pd-Co with different composition ratio; (a) Pd 10 g/L : Co 1.0... 150
Fig. 5.8. Thickness graph of electrodeposited Pd-Co with different composition ratio. 151
Fig. 5.9. XRD analysis of electrodeposited Pd-Co with different composition ratio; (a) Bare metal(Cu), (b) Pd 10 g/L : Co 1.0 g/L,... 154
Fig. 5.10. XPS spectra of Pd3d band and Co2p band for electrodeposited Pd-Co with Pd 2 g/L : Co 5 g/L. 155
Fig. 5.11. XRD analysis of electrodeposited Pd-Co with different composition ratio. 156
Fig. 5.12. TEM images of electrodeposited Pd-Co; (a) HRTEM image, and (b) selected area electron diffraction(SAED). 157
Fig. 5.13. Hardness comparison of bare metal(Cu) and electrodeposited Pd-Co with different composition ratio. 160
Fig. 5.14. Potentiodynamic polarization curves of bare metal(Cu) and electrodeposited Pd-Co with different composition ratio. 162
Fig. 5.15. Electrical conductivitiy graphs of electrodeposited Pd-Co with different composition ratio; (a) Bare metal(Cu), (b) Pd 10 g/L :... 165
Fig. 5.16. Electrical conductivities graph of bare metal(Cu) and electrodeposited Pd-Co with different composition ratio. 166