In this study, fluorosilicone (FVMQ) polymers were made and analyzed for the contents, viscosity, and thermal properties of the products. Anionic ring-opening copolymerization of 2,4,6-tris (3,3,3- trifluoropropyl)-2,4,6-trimethyl-cyclotrisiloxane (F₃) with octamethylcyclotetrasiloxane (D₄) was facilitated and improved by using trimethylammonium siloxane (TMAS) as the initiator and 1,3-Divinyltetramethyldisiloxane (ViMMVi) as end blocker. As a result of analysis of viscosity, gel permeation chromatography (GPC), and 1H nuclear magnetic resonance (NMR), the components, viscosity, and molecular weight of the polymers were found to be well controlled by mol ratio of the raw materials. It was shown that increasing the trifluoropropyl group makes the polysiloxane amorphous and moves the glass temperature of the polymer to a higher temperature through a differential scanning calorimeter (DSC). The results of thermogravimetric analysis (TGA) were shown that excessive fluoro contents could induce the problem of the dynamic equilibrium between the polysiloxane and the cyclosiloxane.