표제지
목차
국문 요약 8
영문 요약 10
제1장 서론 16
제2장 이론적 배경 20
2.1. 기계적 합금화(Mechanical Alloying, MA) 20
2.1.1. 유성 볼 밀(Planetary Ball Mill, PBM) 22
2.1.2. Milling Energy 계산 23
2.2. 전이금속 질화물 코팅 27
2.3. DC 마그네트론 스퍼터링 29
제3장 실험 방법 31
3.1. AlCrFeTi 합금 분말의 제조 33
3.1.1. 유성볼밀링을 이용한 AlCrFeTi 합금 분말 제조 33
3.2. AlCrFeTi 합금 타겟의 제작 및 분석 37
3.2.1. SPS / Hot press 를 이용한 AlCrFeTi 합금 타겟의 제작 37
3.2.2. AlCrFeTi 합금 타겟의 분석 38
3.3. AlCrFeTiN 코팅 증착 및 분석 39
3.3.1. Magnetron sputter 를 이용한 AlCrFeTiN 코팅 증착 39
3.3.2. AlCrFeTiN 코팅 분석 42
제4장 결과 및 고찰 44
4.1. AlCrFeTi 합금 분말 제조 결과 44
4.1.1. 공정 조건 변화에 따른 Milling Energy 계산 결과 45
4.1.2. 합금 분말의 SEM 분석 결과 47
4.1.3. 합금 분말의 XRD 분석 결과 50
4.1.4. 합금 분말의 DSC 분석 결과 53
4.2. AlCrFeTi 합금 타겟 소결 결과 55
4.2.1. 합금 타겟의 OM 분석 결과 55
4.2.2. 합금 타겟의 경도 분석 결과 57
4.2.3. 합금 타겟의 Vicker's indentation 분석 결과 58
4.3. AlCrFeTiN 코팅의 분석 결과 61
4.3.1. 코팅의 SEM / EDS 분석 결과 61
4.3.2. 코팅의 XRD 분석 결과 67
4.3.3. 코팅의 Nano indentation 분석 결과 68
4.3.4. 코팅의 Scratch test 분석 결과 70
4.3.5. 코팅의 Ball on disc 분석 결과 72
4.3.6. 코팅의 동전위 분극 시험 결과 75
제5장 결론 77
참고문헌 80
Table 3-1. Mechanical Alloying(MA) conditions 35
Table 3-2. Sputtering target sintering sputtering conditions 38
Table 3-3. DC Magnetron sputtering conditions 41
Table 4-1. Ball speed and ball energy by rpm 45
Table 4-2. Electrochemical characteristics of coatings 76
Fig.1-1. Global market scale of cutting tool 17
Fig.1-2. Schematic diagram structure of AlCrN coatings of various Al content 19
Fig.1-3. Hardness and abrasive wear rate of various Al content 19
Fig.2-1. Structure changes in powder during mechanical during mechanical alloying process 21
Fig.2-2. Schematic of Planetary Ball Milling process 22
Fig.2-3. Milling parameters for the case of a planetary mill and cylinder mill 23
Fig.2-4. Octahedral interstitial site and Trigonal prism interstitial site of N atom in transition metal nitride 28
Fig.2-5. Schematic diagram of DC Magnetron Sputtering 30
Fig.3-1. Process procedure of AlCrFeTiN coating 32
Fig.3-2. Planetary Ball Mill (PBM) 33
Fig.3-3. Milling Power consumption according to ball filling factor 34
Fig.3-4. Analysis equipment of AlCrFeTi alloy powder. (a) FE-SEM, (b) DSC, (c) XRD[내용없음] 12
Fig.3-5. Schematic diagram of DC Magnetron sputter 39
Fig.4-1. Total milling energy change by process variable 46
Fig.4-2. Mapping image of AlCrFeTi alloy powder (120 rpm) 48
Fig.4-3. Mapping image of AlCrFeTi alloy powder (200 rpm) 48
Fig.4-4. Mapping image of AlCrFeTi alloy powder (300 rpm) 49
Fig.4-5. Analysis result of 120rpm alloy powder XRD 51
Fig.4-6. Analysis result of 200rpm alloy powder XRD 51
Fig.4-7. Analysis result of 300rpm alloy powder XRD 52
Fig.4-8. Analysis result of 120rpm alloy powder DSC 54
Fig.4-9. Analysis result of 200rpm alloy powder DSC 54
Fig.4-10. Analysis result of 300rpm alloy powder DSC 55
Fig.4-11. AlCrFeTi target OM image by sintering process temperature. (a) : 120 rpm_400 ℃, (b) : 120 rpm_480 ℃, (c) : 120 rpm_600 ℃, (d) : 300 rpm_400 ℃, (e) : 300 rpm_480 ℃, (f) : 300 rpm_600℃ 56
Fig.4-12. Vicker's hardness result (left: low milling energy target, right: high milling energy target) 57
Fig.4-13. Vicker's indentation result of high milling energy powder by sintering process condition 59
Fig.4-14. AlCrFeTi target image sintered by hot press(left: low milling energy target, right: high milling energy target) 60
Fig.4-15. AlCrFeTiN thin film cross SEM image. (a) 120 rpm_36:0, (b) 120 rpm_33:3, (c) 120 rpm_30:6, (d) 300 rpm_36:0, (e) 300rpm_33:3, (f) 300 rpm_30:6 63
Fig.4-16. Coating surface EDS results by Nitrogen flow rate 65
Fig.4-17. Composition ratio of AlCrFeTi thin film without nitrogen 66
Fig.4-18. Analysis result of AlCrFeTiN XRD (left : low milling energy target coating, right : high milling energy target coating) 67
Fig.4-19. Coating hardness and modulus of elasticity by nitrogen flow rate 69
Fig.4-20. Analysis result of AlCrFeTiN scratch test (low milling energy target coating) (a) Ar : N₂_36 : 0, (b) Ar : N₂_33 : 3, (c) Ar : N₂_30 : 6 71
Fig.4-21. Analysis result of AlCrFeTiN scratch test (high milling energy target coating) (a) Ar : N₂_36 : 0, (b) Ar : N₂_33 : 3, (c) Ar : N₂_30 : 6 71
Fig.4-22. Analysis result of ball on disc 72
Fig.4-23. OM image of ball on disc wear track (a) 120 rpm_36 : 0, (b) 120 rpm_33 : 3, (c) 120 rpm_30 : 6,... 73
Fig.4-24. Polarization curve of coatings 75