Title Page
Abstract
국문요약
Contents
1. INTRODUCTION 10
2. Experimental 16
2.1. Materials 16
2.2. Equipment 16
2.3. Synthesis 17
2.4. Evaluation procedure 23
3. Result and discussion 25
4. Conclusion 41
5. Reference 42
Table 1. EA data of SnPcL, ZnPcL 28
Figure 1. Photolithography process 11
Figure 2. EUV lithography process 12
Figure 3. Photon stochastic issue 12
Figure 4. RLS trade-off issue 13
Figure 5. ¹H-NMR spectrum of 4-(2-(1,1,2,3,3,3-hexafluoro-2-(perfluoropropoxy) propoxy)-1,1,2-trifluoroethoxy) benzene-1,2-dinitrile (L-phthalonitrile) 26
Figure 6. FT-IR spectrum of Perfluoroalkyl ether substituted Tin phthalocyanine (SnPcL), Perfluoroalkyl ether substituted Zinc phthalocyanine (ZnPcL) 27
Figure 7. UV-Vis absorption spectrum of Perfluoroalkyl ether substituted Tin phthalocyanine (SnPcL), Perfluoroalkyl ether substituted Zinc phthalocyanine (ZnPcL) 27
Figure 8. Contrast curve data of SnPcL, ZnPcL 29
Figure 9. EUV pattern image of SnPcL, ZnPcL 29
Figure 10. XPS data before and after EUV exposure of SnPcL 31
Figure 11. XPS data before and after EUV exposure of ZnPcL 32
Figure 12. Nanoindentation data of SnPcL 33
Figure 13. Nanoindentation data of ZnPcL 33
Figure 14. Etching test graph of SnPcL, ZnPcL 35
Figure 15. ¹H-NMR spectrum of 4-(2,3,5,6-tetrafluoro-4-(trifluoromethyl) phenoxy) phthalonitrile (PFT-phthalonitrile) 36
Figure 16. ¹H-NMR spectrum of Perfluorotoluene substituted metal free phthalocyanine (H2Pc-PFT) 36
Figure 17. ¹H-NMR spectrum of Perfluorotoluene substituted Tin phthalocyanine (SnPc-PFT) 37
Figure 18. FT-IR spectrum of Perfluorotoluene substituted metal free phthalocyanine (H2Pc-PFT), Perfluorotoluene substituted Tin phthalocyanine (SnPc-PFT) 38
Figure 19. UV-Vis absorption spectrum of Perfluorotoluene substituted metal free phthalocyanine (H2Pc-PFT), Perfluorotoluene substituted Tin phthalocyanine (SnPc-PFT) 38
Figure 20. E-beam pattern image of H2Pc-PFT, SnPc-PFT 39
Figure 21. Etching test graph of H2Pc-PFT, SnPc-PFT 40
Scheme 1. Synthesis of 4-(2-(1,1,2,3,3,3-hexafluoro-2-(perfluoropropoxy) propoxy)-1,1,2-trifluoroethoxy) benzene-1,2-dinitrile (L-phthalonitrile) 17
Scheme 2. Synthesis of Perfluoroalkyl ether substituted Tin phthalocyanine (SnPcL) 18
Scheme 3. Synthesis of Perfluoroalkyl ether substituted Zinc phthalocyanine (ZnPcL) 19
Scheme 4. Synthesis of 4-(2,3,5,6-tetrafluoro-4-(trifluoromethyl) phenoxy) phthalonitrile (PFT-phthalonitrile) 20
Scheme 5. Synthesis of Perfluorotoluene substituted metal free phthalocyanine (H2Pc-PFT) 21
Scheme 6. Synthesis of Perfluorotoluene substituted Tin phthalocyanine (SnPc-PFT) 22
Scheme 7. EUV crosslinking mechanism of SnPcL, ZnPcL 34