표제지
목차
국문 요약 9
영문 요약 10
제1장 서론 11
제2장 이론적 배경 14
제2.1절 와이어 본딩 14
제2.2절 원자층 증착 (Atomic Layer Deposition, ALD) 17
제2.2.1절 전구체 (Precursor) 흡착 및 퍼지 17
제2.2.2절 반응체 (Reactant) 반응 및 퍼지 18
제3장 ALD 을 이용한 Al₂O₃ 막 두께 제어 19
제3.1절 서론 19
제3.2절 실험 방법 20
제3.3절 결과 및 고찰 22
제4장 Al₂O₃ 코팅에 의한 와이어의 절연 특성 24
제4.1절 서론 24
제4.2절 실험 방법 25
제4.3절 결과 및 고찰 27
제5장 Al₂O₃ 코팅 와이어의 FAB 형상 및 접합 특성 29
제5.1절 서론 29
제5.2절 실험 방법 30
제5.3절 결과 및 고찰 32
제5.3.1절 FAB(free air ball) 형상 32
제5.3.2절 OCB(off centered ball) 발생률 35
제5.3.3절 접합 특성 37
제6장 종합 결론 43
참고 문헌 44
Table 1. Technical data sheet of Ag 98.7% alloy wire 20
Table 2. Technical data sheet of PCC wire 22
Table 3. List of Al₂O₃ coated sample 25
Table 4. Result of insulation test by Al₂O₃ coating thickness 28
Table 5. Bonding condition and parameters 31
Fig 1. Schematic of package 14
Fig 2. Cycle of wire bonding 15
Fig 3. Wire bonding 15
Fig 4. Free air ball shape of Ag alloy wire depends on gas condition 16
Fig 5. Atomic layer deposition cycle 17
Fig 6. Schematic of atomic layer deposition 18
Fig 7. Schematic of Al₂O₃ coated wire 19
Fig 8. Analysis of Al₂O₃ thickness using TEM and EDS 21
Fig 9. Measurement of Al₂O₃ thickness using TEM; (a)ALD 200 Cycle, (b)ALD 250 Cycle 22
Fig 10. EELS Mapping of Al₂O₃ coated layer 23
Fig 11. Correlation between Al₂O₃ thickness and ALD cycle 23
Fig 12. Schematic of insulation test 26
Fig 13. Measuring resistance of non coated wire using multimeter; (a)1-3 point, (b)2-4 point 26
Fig 14. Insulation test; (a)5nm 1-3 Point, (b)5nm 2-4 Point, (c)12nm 1-3 Point (d)12nm 2-4 Point 28
Fig 15. (a)Abnormal FAB, (b)Tilt Ball, (c)Off centered ball 29
Fig 16. Off centered ball criteria 31
Fig 17. SEM images of free air ball by Al₂O₃ coating thickness 33
Fig 18. SEM images of free air ball; (a)Ag alloy wire, (b)6nm coated wire (c) 8nm coated wire (d)10nm coated wire 33
Fig 19. Heat affected zone of 8nm Al₂O₃ coated wire 34
Fig 20. EDS Spot analysis of (a)free air ball, (b)ball neck 34
Fig 21. Observation of off centered ball by Al₂O₃ coating thickness using optical micro scope 35
Fig 22. Off centered ball depends on thickness of Al₂O₃ 36
Fig 23. Result of (a)ball shear test, (b)ball pull test, (c)stitch pull test 40
Fig 24. SEM images of (a)bond shape, (b)loop, (c)bonded ball top view, (d)stitch, (e)bonded ball side view (f)stitch edge 41
Fig 25. SEM images of cross sectioned ball bond and stitch; (a)bonded ball: mag.-1K, (b)stitch: mag.-1K, (c)bonded ball: mag.-6K, (d)stitch:... 42