표제지
목차
요약문 6
Abstract 7
1. 서론 11
1.1. 연구 배경 11
1.2. 연구 목적 14
2. 이론 16
2.1. OLED 16
2.2. Machine Vision 19
3. OLED 보호 Film Cutting Line 보정용, Real Time Inspection Module 개발 22
3.1. Testing Stage 설계 및 제작 22
3.2. Testing Stage의 구조 안정성 평가 29
3.2.1. 구조 해석을 통한 설계 안정성 평가 29
3.2.2. 진동 해석을 통한 설계 안정성 평가 35
3.3. Real Time Inspection Module의 Optical System 최적화 41
3.3.1. Optical System 구성 41
3.3.2. Align 및 Inspection을 위한 조명 및 영상 최적화 45
4. Real Time Inspection Module을 이용한 Edge Detecting 48
4.1. Edge Detecting Algorithms 48
4.2. Real Time Inspection Module 이용한 Edge Detecting 53
4.2.1. Caliper 53
4.2.2. Find Line Edge Detecting 59
4.2.3. Real Time Inspection Module의 Edge Detecting 평가 65
5. 결론 68
REFERENCE 70
Table 3-1. Specification of Testing Stage (X,Y,θ) 28
Table 3-2. Specification of Testing Stage (Z) 28
Table 3-3. Material Property of Structure Steel 32
Table 3-4. Material Property of Aluminum alloy 6061 32
Fig. 1-1. OLED / LCD lighting inspection process 13
Fig. 1-2. Laser cutting and Real Time Inspection process 15
Fig. 2-1. Multi-layer OLED 18
Fig. 2-2. Real Time Inspection Flow Chart 21
Fig. 3-1. Configuration of Testing Stage 24
Fig. 3-2. Configuration of Optical Table 24
Fig. 3-3. Configuration of Bridge of Optical Table 24
Fig. 3-4. Configuration of X/Y/θ Stage 3D Modeling 25
Fig. 3-5. Configuration of Z Stage 25
Fig. 3-6. Configuration of Control System 26
Fig. 3-7. Configuration of Real-time Acquisition 27
Fig. 3-8. 3D modeling correction to minimize errors in finite... 31
Fig. 3-9. Finite element model 31
Fig. 3-10. Set boundary conditions for the system 33
Fig. 3-11. Result of static structure analysis 34
Fig. 3-12. Result of Modal analysis 37
Fig. 3-13. Result of Modal analysis (Total deformation) 38
Fig. 3-14. Amplitude analysis according to frequency 39
Fig. 3-15. Phase angle analysis according to frequency 39
Fig. 3-16. Total deformation of the system at 515.06㎐ 40
Fig. 3-17. Equivalent stress of the system at 515.06㎐ 40
Fig. 3-18. Configuration of optical system 44
Fig. 3-19. Schematics of Real Time Inspection 46
Fig. 3-20. Grayscale Image of Ring Type Light 46
Fig. 3-21. NIR image with stage and panel attached 47
Fig. 3-22. NIR image with stage and panel separated 47
Fig. 4-1. Edge Detecting Algorithm 50
Fig. 4-2. Edge Detecting Algorithm 51
Fig. 4-3. Edge Detecting Algorithm 52
Fig. 4-4. Caliper setting process (Right Line In Edge) 55
Fig. 4-5. Inspection image of Caliper (Right Line In Edge) 55
Fig. 4-6. Caliper setting process (Right Line Out Edge) 56
Fig. 4-7. Inspection image of Caliper (Right Line Out Edge) 56
Fig. 4-8. Caliper setting process (Right R In Edge) 57
Fig. 4-9. Inspection image of Caliper (Right R In Edge) 57
Fig. 4-10. Caliper setting process (Right R Out Edge) 58
Fig. 4-11. Inspection image of Caliper (Right R Out Edge) 58
Fig. 4-12. Find Line setting process (Right Line In Edge) 61
Fig. 4-13. Inspection image of Find Line (Right Line In Edge) 61
Fig. 4-14. Find Line setting process (Right Line Out Edge) 62
Fig. 4-15. Inspection image of Find Line (Right Line Out Edge) 62
Fig. 4-16. Find Line setting process (Right R In Edge) 63
Fig. 4-17. Inspection image of Find Line (Right R In Edge) 63
Fig. 4-18. Find Line setting process (Right R Out Edge) 64
Fig. 4-19. Inspection image of Find Line (Right R Out Edge) 64
Fig. 4-20. Caliper setting process (Right panel) 66
Fig. 4-21. Inspection image of Caliper (Right panel) 66
Fig. 4-22. Find Line setting process (Right panel) 67
Fig. 4-23. Inspection image of Find Line (Right panel) 67