Title Page
Contents
Abstract 9
1. Introduction 11
2. Theories of Research 15
2.1. Hydrogen Sensor 15
2.1.1. Semiconductor Type Sensor 16
2.1.2. Ceramic Semiconductor Sensor 17
2.1.3. Semiconductor Element-Type Sensor 18
2.1.4. Electrochemical Sensor 19
2.1.5. Optical Detectable Type Sensor 20
2.2. SnO₂ 21
2.3. Electron Beam Evaporation 22
2.3.1. Electron Beam Evaporation Heating Method 24
2.3.2. Electron Beam Evaporation Auxiliary Deposition 25
3. Experiment 29
3.1. SnO₂ Thin Film Deposition Process 29
3.1.1. Sample Cleaning and Zig Making 33
3.1.2. Production of Agate Crucible 33
3.1.3. Condition setting for the deposition process 34
3.2. Sensor Experiment Process 35
4. Characteristics of SnO₂ Thin Film 38
4.1. SEM 38
4.2. EDS 39
4.3. AFM 40
4.4. Hydrogen Sensor Characteristics Analysis 41
5. Conclusion 43
References 44
국문초록 47
Table 1. SnO₂ Thin Film Process 30
Fig. 1. Semiconductor type sensor structure 17
Fig. 2. Ceramic semiconductor sensor structure 18
Fig. 3. MOSFET type gas sensor structure 19
Fig. 4. Chemical formula for electrical sensor architecture 20
Fig. 5. Optical Detectable Sensor Structure 21
Fig. 6. Electron Beam Evaporation Deposition 23
Fig. 7. Electron Beam Evaporation Heating Method 24
Fig. 8. Kaufman type 26
Fig. 9. End-Hall type 28
Fig. 10. Schematic diagram of the Electron Beam Evaporation System 31
Fig. 11. Thickness measuring sensor 32
Fig. 12. Chamber Cleaning and Zig Installation 33
Fig. 13. crucible installation 34
Fig. 14. Optical Sensor Schematic Diagram 36
Fig. 15. Sensor Response Measurement Schematic Diagram 36
Fig. 16. Sensor Response Measuring Device Plot 37
Fig. 17. Thin film thickness and sensor 38
Fig. 18. Qualitative Analysis Results 39
Fig. 19. Atomic Force Microscopy Analysis 40
Fig. 20. Before and after sensor attachment 41
Fig. 21. Hydrogen sensor experiment (H₂ 4%) 42