표제지
목차
국문요약 8
Abstract 9
1. 서론 10
2. 이론적 배경 13
2.1. 질화알루미늄의 제조법, 결정구조 및 특성 13
2.2. 질화알루미늄의 열전도도 16
2.3. 질화알루미늄의 상압소결 17
3. 실험방법 19
3.1. 소결조제 첨가량에 따른 시편분류 19
3.2. 분말 혼합 및 건조 22
3.3. 성형 및 냉간 정수압 성형 22
3.4. 성형체 소결 22
3.5. 밀도 측정 22
3.6. 열전도도 측정 23
3.7. 굽힘 강도 측정 24
3.8. 비커스 경도 측정 24
3.9. X 선 회절 분석 24
3.10. 미세구조 분석 25
4. 결과 26
4.1. 상대밀도 26
4.2. 결정상 분석 29
4.3. 열전도도 33
4.4. 비커스 경도 38
4.5. 굽힘 강도 41
4.6. 미세구조 44
5. 고찰 48
6. 결론 50
7. 참고문헌 51
Table1. Various Properties of AlN. 15
Table2. Experimental Groups used in this study. 20
Fig1. Various Application of AlN. (LED Substrate, AlN Heater, Hybrid type of AlN) 12
Fig2. Basic Phenomena of Sintering. 17
Fig3. Thermal Conductivity Samples used in this study. 21
Fig4. Change of Relative Density of the Sintered AlN Specimens. (AY, AS group) 27
Fig5. Change of Relative Density of the Sintered AlN Specimens. (ASY group) 28
Fig6. XRD Patterns of the Sintered AlN Specimens. (AY group) 30
Fig7. XRD Patterns of the Sintered AlN Specimens. (AS group) 31
Fig8. XRD Patterns of the Sintered AlN Specimens. (ASY group) 32
Fig9. Thermal Conductivity of the Sintered AlN Specimens. (AY, AS group) 34
Fig10. Thermal Conductivity of the Sintered AlN Specimens. (ASY group) 35
Fig11. Thermal Diffusivity of the Sintered AlN Specimens. (AY, AS group) 36
Fig12. Thermal Diffusivity of the Sintered AlN Specimens. (ASY group) 37
Fig13. Vickers Hardness of the Sintered AlN Specimens. (AY, AS group) 39
Fig14. Vickers Hardness of the Sintered AlN Specimens. (ASY group) 40
Fig15. Bending Strength of the Sintered AlN Specimens. (AY, AS group) 42
Fig16. Bending Strength of the Sintered AlN Specimens. (ASY group) 43
Fig17. Microstructure of the Sintered AlN Specimens. (AY group) 45
Fig18. Microstructure of the Sintered AlN Specimens. (AS group) 46
Fig19. Microstructure of the Sintered AlN Specimens. (ASY group) 47