표제지
목차
보고서 요약서 3
요약문 4
SUMMARY 13
제1장 서론 32
제2장 길이 측정표준 선진화 33
제1절 신규 측정표준 확립 33
1. 실리콘 웨이퍼의 두께프로파일 33
2. Total station 수직각 교정 장치 및 절대수평 측정기개발 33
제2절 측정 및 교정능력 향상 연구 41
1. 레이저 간섭계 교정 기술 개발 41
2. 2차원 스캔형 접촉식 표면형상 측정기를 이용한 표면거칠기 표준 확립 66
3. 레이저 간섭계를 이용한 1차원 변위 센서 교정 시스템 개발 75
4. 수직각 측정 분야의 정확도 향상 연구 80
제3절 MRA를 위한 품질시스템 향상 81
1. 2차원 절대 위치 엔코더 개발 81
2. 게이지 블록 간섭무늬의 소수차수 측정 정확도 향상 89
3. 게이지 블록 간섭계의 온도 측정 정확도 향상 89
제4절 국제비교 활동 90
제5절 국가표준체계의 유지 91
1. 국제비교 91
2. 국제활동 92
3. 표준보급활동 94
4. 연구성과의 보급 97
제3장 시간주파수 측정표준 선진화 99
제4장 질량힘 측정표준 선진화 100
제1절 신규 측정표준 확립 100
1. 자속양자 기반 pN 힘표준 개발 100
2. 발란스 방식 저용량 힘표준 확립 105
제2절 측정 및 교정능력(CMC) 향상 111
1. 고체밀도 측정물 범위확장 연구 111
2. 절대중력 정확도향상 연구 117
3. 상대중력 정확도향상 연구 118
4. 질량 신표준을 위한 전달용 표준기 개발 136
5. 기체 동압 표준 확립 143
6. 정적팽창법을 이용한 중진공표준 확립 150
7. 마이크로 부피 범위확장 160
제3절 MRA를 위한 품질시스템 향상 167
1. 50 kg 질량비교기 특성평가 연구 167
2. 초음파 간섭 수은주 압력계를 이용한 진공 표준 향상 연구 167
3. 전달용 토크표준기 특성 연구 168
제4절 국제비교 활동 174
1. 100 kN 국제비교 (APMP.M.F-K2) 174
2. 500 mg, 5 g, 10 g, 100 g and 5 kg 국제비교 (CCM.M-K7) 175
제5절 국가표준체계의 유지 177
1. 국제비교 177
2. 국제활동 180
3. 표준보급활동 182
4. 연구성과의 보급 185
제5장 온도 측정표준 선진화 187
제1절 신규 측정표준 확립 187
제2절 측정 및 교정능력 향상 연구 188
1. 음향기체온도계 열역학 온도측정 정확도 향상 188
2. Ne 삼중점 동위원소 의존성 평가 195
3. Xe 삼중점 실현을 통한 저온온도눈금 정확도 향상 202
4. ITS-90 고정점 정밀도 향상을 위한 등온영역 실현기술 개발 208
5. 박막 열확산도 측정기술 개발 236
제3절 MRA를 위한 품질시스템 향상 249
1. 고정점 온도의 측정전류 주파수 의존성 평가 249
2. 은 응고점 소급체계 개선 265
3. 산화 알루미늄 노점계 교정 유효성 평가 272
4. Calvet 열량계 비열측정 성능 사전조사 278
제4절 국제비교 활동 285
1. CCT-K9 국제비교 285
2. APMP.T-K3.4 양자간 국제비교 286
3. 아연 응고점 국제비교 (APMP.T-K3.5) 287
4. APMP.T-S6 국제비교 288
제5절 국가표준체계의 유지 290
1. 국제비교 290
2. 국제활동 294
3. 표준보급활동 296
4. 연구성과의 보급 298
제6장 광도 측정표준 선진화 301
제7장 전기자기 측정표준 선진화 302
제1절 신규 측정표준확립 302
1. 디지털 기반 저주파 임피던스 브리지 개발 302
2. 전기용량 주파수 확장 311
제2절 측정 및 교정능력 향상 연구 325
1. 10-V 프로그래머블 조셉슨전압표준기 및 디지털 임피던스 브리지개발 325
2. 양자홀저항 측정범위 확장 및 불확도 향상 325
3. 고저항 정확도 향상 325
4. 교류전류표준의 전류 및 주파수 확장연구 325
5. 전력 범위확장 325
6. 저주파 임피던스 듀얼 소스 브리지 개발 및 임피던스 재확립 325
제3절 MRA를 위한 품질시스템 향상 325
1. 다기능교정기의 교정자동화 325
2. 조셉슨전압 표준 분야에 대한 연구 325
3. 직류전압비율 표준 분야에 대한 연구 325
4. 극저주파 전기장 표준 분야에 대한 연구 325
제4절 국제비교 활동 325
1. 직류전압 표준 분야 국제비교 325
2. 자속밀도 국제비교(P1-APMP.EM-S13) / 박포규 326
3. 직류전압 표준 분야 국제비교 332
4. 교류전류 교직차 표준 분야 국제비교 334
제5절 국가표준체계의 유지 337
1. 국제비교 337
2. 국제활동 339
3. 표준보급활동 343
4. 연구성과의 보급 347
제8장 전자파 측정표준 선진화 349
제1절 신규 측정표준 확립 349
1. 동축형 특성임피던스 349
제2절 측정 및 교정능력 향상 연구 349
1. K-대역 안테나 이득 정확도 향상 (2/2) 349
2. 전자기장의 세기 범위확장에 대한 연구 357
3. 펄스 스펙트럼 진폭 정확도 향상 364
제3절 MRA를 위한 품질시스템 향상 365
1. 7 mm 동축형 미소열량계 수조 내 물질 대체 연구 365
2. 전자기장의 세기 품질향상을 위한 마스트 제작 369
3. 2.4 mm 동축형 전력감지기 전력측정 신뢰성 향상 373
제4절 국제비교 활동 374
제5절 국가표준체계의 유지 375
1. 국제비교 375
2. 국제활동 376
3. 표준보급활동 376
4. 연구성과의 보급 377
제9장 유동음향 측정표준 선진화 378
제1절 신규 측정 표준 확립 378
1. 자유음장 가역교정 선진화 378
제2절 측정 및 교정능력 향상 연구 396
1. 골전도용 청력계 교정 시스템 구성 연구 396
2. 대용량 액체유량 표준시스템 구축 403
3. 수중음향 하이드로폰 교정 선진화 416
제3절 MRA를 위한 품질시스템 향상 430
1. 고압 기체유량 온도 조절장치 설계 및 제작 430
2. 연안 풍력발전에서 발생하는 수중방사소음 예측 및 측정모델 개발 연구 442
3. 음향-유동장 동시 측정 기술 검토 454
4. iSensor/iMEMS 평가를 위한 측정 기술 개발 검토 459
제4절 국제비교 활동 464
1. 상압기체유량 국제비교(CCM. FF-K6b) 464
2. 기름유량 국제비교 (CCM.FF-K2.1.2011) 465
3. 회전진동 절대교정 양자 비교 (bilateral comparison in primary angular vibration calinration) 467
제5절 국가표준체계의 유지 470
1. 국제비교 470
2. 국제활동 471
3. 표준보급활동 472
4. 연구성과의 보급 476
Table 2-1-1-1. Uncertainty budget of vertical angle measurement 38
Table 2-2-1-1. Uncertainty evaluation of laser interferometer calibration using 50 m tape bench. 48
Table 2-2-1-2. Uncertainty evaluation of laser interferometer calibration using 2 m test bed. 50
Table 2-2-1-3. Characteristics of the laser, Innolight, Diabolo 52
Table 2-2-1-4/Table. 2-2-1-2. Development of laser interferometer technology. 65
Table 2-2-2-1. Repeatability test result of 0.44 μm roughness specimen 69
Table 2-3-1-1. Research on improvement of 2D absolute position encoder. 89
Table 4-1-1-1. Summary 104
Table 4-1-2-1. Summary 109
Table 4-1-1-1. Uncertainty budget of reference liquid, tridecane 114
Table 4-1-1-2. Uncertainty budget of 20 kg weight 114
Table 4-2-3-1. Uncertainty budget of relative gravity measurement 133
Table 4-2-3-2. Summary 135
Table 4-2-4-1. Summary of physical property of selected materials. 138
Table 4-2-4-2. Critical power for Ar-plasma according to process pressure 140
Table 4-2-4-3. Summary 142
Table 4-2-5-1. Summary 149
Table 4-2-6-1. Uncertainty of SES 159
Table 4-2-6-2. Summary 159
Table 4-2-7-1. Uncertainty budget for 5 uL 165
Table 4-2-7-2. Uncertainty budget for 50 uL 165
Table 4-2-7-3. Uncertainty budget for 500 uL 166
Table 4-2-7-4. Summary 166
Table 4-3-3-1. Temperature and humidity coefficients of sensitivity of the torque transducers 172
Table 4-3-3-2. Summary 173
Table 4-4-1-1. Schedule of APMP.M.F-K2 174
Table 4-4-2-1. History of CCM Key comparison in mass standards 175
Table 4-4-2-2. Recommended Participants by RMO TCM chair. 176
Table 4-4-2-3. The sequence of circulation and measurement date 176
Table 5-2-1-1. Summary of the research on the improvement of the accuracy for thermodynamic temperature measurement using acoustic gas thermometer 194
Table 5-2-2-1. Summary of the research on the dependence of the triple point of neon on the isotopic composition 201
Table 5-2-3-1. Xenon gas samples available or used in this study. 203
Table 5-2-3-2. Uncertainty assessment of the triple point of xenon realized by the open-type cryogenic triple point system 206
Table 5-2-3-3. Abundance of isotopes of Xe used in this study compared with values from literature for Natural xenon 207
Table 5-2-3-4. Summary of the research on the dependence of the triple point of neon on the isotopic composition 207
Table 5-2-4-1/Table 5-2-4-68. Summary of the research on the development of a precise isothermal region generation technic for accurate ITS-90 fixed-point realization 235
Table 5-3-1-1. Summary of the apparatuses 251
Table 5-3-1-2. Similarity conditions for various RTPW and I combinations 254
Table 5-3-1-3. Nonlinearities of the bridges at different measuring current frequencies 255
Table 5-3-1-4. Temperature difference at Ag FP 258
Table 5-3-1-5. Summary of the research on the effect of measuring current frequency on the fixed-point temperatures at Ag FP, Zn FP, and Hg TP 264
Table 5-3-2-1. Impurity concentrations of the Ag sample 267
Table 5-3-2-2. New Ag FP cell specification 268
Table 5-3-2-3. Specifications of the instruments used for Ag FP measurements 270
Table 5-3-2-4. Temperature difference bet ween the newly made Ag FP cells and thereference Ag FP cell 271
Table 5-3-2-5. Summary of the research on the Ag FP traceability improvement 271
Table 5-3-3-1. Measurement range of dew-point temperature and relative humidity depending on industrial fields using aluminum oxide dew point hygrometers. 273
Table 5-3-4-1. Sample mass of SRM720 281
Table 5-3-4-2. Sample mass and heat flow ratio of Deionized water 282
Table 5-3-4-3. Sample mass and heat flow ratio of Deionized water 283
Table 7-1-2-1. Measured effective capacitance and dissipation factor. 318
Table 7-1-2-2. Measurement result and the uncertainty of 1 pF standard 321
Table 7-1-2-3. Measurement result and the uncertainty of 10 pF standard 322
Table 7-1-2-4. Measurement result and the uncertainty of 100 pF standard 322
Table 7-1-2-5. Measurement result and the uncertainty of 1000 pF standard 323
Table 7-1-2-6. Extension of calibration frequency for 4TP capacitance standards 324
Table 7-4-2-1. Results of coils constant determination(Uncertainty: Extended uncertainty with k=2). 329
Table 7-4-2-2. KRISS uncertainty budgets. 330
Table 7-4-2-3. NML-SIRIM uncertainty budgets. 330
Table 8-2-1-1. Horn antenna and adapter 351
Table 8-2-1-2. Far-field gain of horn antenna 351
Table 8-2-1-3. Gain difference of Ku-band horn antenna 351
Table 8-2-1-4. Far-field gain of K-band horn antenna (a) Horn #1 (b) Horn #2 (c) Horn #3 352
Table 8-2-1-5. Gain uncertainty budget for horn #1 at 18 GHz 354
Table 8-2-1-6. Gain uncertainty budget for horn #1 at 22 GHz 355
Table 8-2-1-7. Gain uncertainty budget for horn #1 at 26.5 GHz 356
Table 8-2-2-1. Calibration factor and uncertainty of the HI-4453 field probe(Electric field strength 30 V/m) 362
Table 8-2-2-2. Uncertainty budge of CF(Calibration factor) at (a) 18 GHz (b) 22 GHz © 26.5 GHz, (Electric field strength 30 V/m) 363
Table 8-3-1-1. Comparison of the effective efficiency measured using the 7-mm coaxial microcalorimeter of which the water bath is filled with distilled water and with styrofoam chips... 367
Table 8-3-1-2. Comparison of the effective efficiency measured using the 7-mm coaxial microcalorimeter of which the water bath is filled with distilled water and with styrofoam chips... 367
Table 8-4-1-1. Protocol of Key Comparison SIM.EM.RF-K5b.CL 374
Table 9-1-1-1. Polynomial coefficients of Eq. (9-1-1-4a). 380
Table 9-1-1-2/Table 9-1-1-1. Study on the enhancement of measurement accuracy for the free-field reciprocity calibration of microphone. 394
Table 9-2-1-1. Comparison of sound pressure levels 399
Table 9-2-1-2. Comparison between the applied and the measured frequency 400
Table 9-2-1-3. Comparison between the applied and the measured sound pressure levels at 1 kHz 401
Table 9-2-1-4. Total harmonic distortions 401
Table 9-2-1-5. Audiometry calibration system for bone-conduction response. 402
Table 9-2-2-1. Calibration and measurement capabilities of national metrology institutes 405
Table 9-2-2-2. Resesarch objectives of the Water Flow Standard System (WFSS) 405
Table 9-2-2-3. Uncertainty evaluation of WFSS 2 (5t) 412
Table 9-2-2-4. Uncertainty evaluation of WFSS 3 (1t) 413
Table 9-2-2-5. Uncertainty evaluation of WFSS 4 (0.1t) 414
Table 9-2-2-6. CMC estimated from Table 9-2-2-3 to Table 9-2-2-5 414
Table 9-2-3-1. Experimental conditions and equipment for the measurements of the sensitivities of hydrophone (RESON TC-4034). 420
Table 9-2-3-2/Table 9-2-3-1. Reciprocity calibration of free-field sensitivity of underwater hydrophone 429
Table 9-3-4-1. Related standards for MEMS sensor. 462
Table 9-4-1-1. Degree of equivalence to KCRV 465
Table 9-4-2-1. Schedules for CCM.FF-K2.1.2011 466
Fig. 2-1-2-1. Setup for Digital level calibration system 35
Fig. 2-1-2-2. Calibartion results of Digital level and staff 35
Fig. 2-1-2-3. Design and developed absolute levelling mirror for calibration of levelling of geodesic survey instruments 36
Fig. 2-1-2-4. Calibration result of levelling value of developed absolute Level with mechanical autocollimator (Davidson D650) 37
Fig. 2-1-2-5. Setup for Digital level calibration system 38
Fig. 2-1-2-6. Calibration result of Vertical angle measurement 38
Fig. 2-2-1-1. Schematic of 50 m tape bench control system. 43
Fig. 2-2-1-2. Photos of (a) stage, (b) sensing system and (c) measuring program. 43
Fig. 2-2-1-3. Setup for calibration of the laser distance meter. 44
Fig. 2-2-1-4. Comparison of two laser interferometer using translator. 45
Fig. 2-2-1-5. Setup for direct comparison of moving distance. 46
Fig. 2-2-1-6. Test results of commercial laser interferometer. 46
Fig. 2-2-1-7. Photos of 2 m test bed for calibrating the laser length measuring interferometer. 50
Fig. 2-2-1-8. Photo of Diabolo laser(a) and its controller(b) 51
Fig. 2-2-1-9. (a) Line-width of Diabolo laser, (b) Frequency curve according to the crystal temperature 52
Fig. 2-2-1-10. Measured frequency fluctuation of Diabolo laser(IR, 1064 nm)at free running state during 12 hours 53
Fig. 2-2-1-11. Doppler free high resolution laser spectroscopies for iodine stabilized laser a) 3rd harmonic spectroscopy b) FMS(Frequency modulation spectroscopy... 54
Fig. 2-2-1-12. Experimental set-up for FMS of molecular iodine 55
Fig. 2-2-1-13. Meaured signal of FMS of molecular iodine(9 ℃ , 611 kHz modulation, 25 mW pump and 1 mW pribe beam intensity) 56
Fig. 2-2-1-14. MTS 법을 이용한 요오드안정화 Nd:YAG 레이저의 주파수 안정화 구조도 57
Fig. 2-2-1-15. Frequency fluctuation of stabilized of Nd : YAG Laser to iodine hyperfine peek (R56, 32-0, a10, iodine temperature at 9℃) 58
Fig. 2-2-1-16. Frequency fluctuation of free running state of Nd : YAG Laser 59
Fig. 2-2-1-17. Laser power spectrum of Nd : YAG Laser 60
Fig. 2-2-1-18. Block diagram for digital locking of laser frequency. 61
Fig. 2-2-1-19. Absorption spectrum of Rb87 D2 line 62
Fig. 2-2-1-20. Frequency stabilization at absorption spectrum of Rb87 D2 line. 62
Fig. 2-2-1-21. Optical layout for frequency stabilization. 63
Fig. 2-2-1-22. Frequency fluctuation of DFB laser stabilized at Cs D1 line. 63
Fig. 2-2-2-1. 2D scanning type surface profile measurement system 66
Fig. 2-2-2-2. Time drift measurement result of all three axes 67
Fig. 2-2-2-3. Measurement setup of standard sphere 68
Fig. 2-2-2-4. Roughness standard specimen and measurement range 68
Fig. 2-2-2-5. Surface profile of roughness standard specimen 69
Fig. 2-2-2-6. A photo of the step-height CRM 70
Fig. 2-2-2-7. Measurement path of step height standard specimen 71
Fig. 2-2-2-8. Step height measurement result of first line of the tool path 71
Fig. 2-2-2-9. Definition of step-height 72
Fig. 2-2-2-10. 단차 반복측정결과 73
Fig. 2-2-3-1. Photo of old calibration system for electronic micrometer 76
Fig. 2-2-3-2. Photo of calibration system for 1 dimensional linear sensors. 77
Fig. 2-2-3-3. Photo of backside of calibration system 78
Fig. 2-2-3-4. Rotational error motions of the linear stage of LM guide. 79
Fig. 2-2-3-5. Schematic of controlling system. 79
Fig. 2-2-3-6. Program for measurement. 80
Fig. 2-3-1-1. An example of the 2D PEBG composed by superimposing two single track APBCs. 82
Fig. 2-3-1-2. New configuration of APBC for the compensation of nonlinearity error. 83
Fig. 2-3-1-3. Schematic diagram of the experimental setup for performance evaluation of the 2D absolute position encoder. 85
Fig. 2-3-1-4. Differences between the planar position values obtained by the laser interferometer and the 2D absolute position encoder when they measured the... 86
Fig. 2-3-1-5. Comparison of the readouts of the 2D absolute position encoder and the laser interferometer when they measured the circular trajectory of 100 ㎚ radius. 87
Fig. 2-3-1-6. Measurement results of the stepwise trajectory of the two-axis PZT stage by using the laser interferometer and the 2D absolute position encoder. 87
Fig. 2-3-1-7. Comparison of the nonlinearity error before and after applying the compensation methods. 88
Fig. 4-1-1-1. Cantilever displacement vs. magnetic field used in preparing magnetic flux quantums in (a) low and (b) high field range. Inset: Magnetic hysteresis. 101
Fig. 4-1-1-2. Temperature dependence of displacement due to maximally trapped flux quantums obtained (a) in 2013 and (b) in 2014. 101
Fig. 4-1-1-3. (a) Upgrades for xy scanning and Hall measurement. (b) Hall voltage vs. y-axis Hall sensor mioco-position. Inset: Hall voltage in wide scanning range. 102
Fig. 4-1-1-4. Comparison of (a) vibration noise power spectrum and (b) time series position data before and after improvement. 103
Fig. 4-1-1-5. (a) Schematic diagram for double-fiber interferometer. (b) Temperature dependence of reference position signal with and without two-fiber feedback. 103
Fig. 4-1-1-6. (a) Interferometer box, (b) fiber feedthrough, and (c) two-fiber holder installed for two-fiber interferometer. 104
Fig. 4-1-2-1. (a) The fabricated balance type force standard machine and (b) photos of the spring structure for exact force control. 105
Fig. 4-1-2-2. (a) Force control with 500 mN capacity using S/W program and (b) force control with 5000 mN capacity. 106
Fig. 4-1-2-3. (a) Relative error of range 50 mN ~ 500 mN and (b) range 500 mN ~ 5000 mN. 107
Fig. 4-1-2-4. Photo of measurement of angle of inclination using clinometer(TESA, Co.) 107
Fig. 4-1-2-5. Comparison of (a) 20 N deadweight force standard machine and (b) the fabricated 5 N balance type force standard machine using a precision loadcell of 20 N capacity (HBM, Co.) 108
Fig. 4-1-2-6. Comparison results with 20 N deadweight force standard machine using 20 N loadcell (HBM, Co.) with respect to rotation of 0˚, 120˚, 240˚. 109
Fig. 4-1-1-1. Schematic(left) and photo(right) of hydrostatic weighing system 112
Fig. 4-1-1-2. Exclusive immersion pan for 20 kg 112
Fig. 4-1-1-3. User interface of automatic measurement program 113
Fig. 4-1-1-4. Comparison of NMI's solid density measurement 115
Fig. 4-2-3-1. Internal structure of relative gravimeter and schematic diagram of zero-length spring 119
Fig. 4-2-3-2. Relative gravimeters (CG5 & Model G) 120
Fig. 4-2-3-3. Drift characteristic according to time 121
Fig. 4-2-3-4. Drift compensation 121
Fig. 4-2-3-5. Drift characteristic in 1 month after the drift correction 122
Fig. 4-2-3-6. Comparison of Earth tide effect between absolute and relative gravimeter 123
Fig. 4-2-3-7. Drift correction factor change for 1 year 123
Fig. 4-2-3-8. Gravity difference according to x-axis tilt angle 125
Fig. 4-2-3-9. Gravity difference of relative gravimeter measurement results with absolute gravity values 126
Fig. 4-2-3-10. Gravity difference of relative gravimeter measurement results after the correction 126
Fig. 4-2-3-11. Comparison of absolute and relative gravity measurement along the vertical axis 127
Fig. 4-2-4-1. Typical example of stainless steel (SS). 138
Fig. 4-2-4-2. UNCD coating experiment: Setup (Left) and Result (Right) 139
Fig. 4-2-4-3. OIML E0 Class bare sample (Left), Ion implanted result (Right) 139
Fig. 4-2-4-4. Oxidation coating facility and AlTiN coating system 140
Fig. 4-2-4-5. ICP type antenna (Left), Installed plasma cleaning system (Middle), First ignited Ar plasma (Right) 140
Fig. 4-2-4-6. The damaged surface of stainless steel by contacting PEEK peg (courtesy by NPL) 141
Fig. 4-2-4-7. The local analysis of AFM in area around the contact point on PEEK peg 141
Fig. 4-2-4-8. XRF analysis of KRISS new peg (Left) and the NPL used peg (Right) 142
Fig. 4-2-5-1. Applications of dynamic pressure measurement 143
Fig. 4-2-5-2. Concept of pneumatic pressure generation and control 144
Fig. 4-2-5-3. Design of pneumatic dynamic pressure standard 145
Fig. 4-2-5-4. Pneumatic dynamic pressure system 146
Fig. 4-2-5-5. Dynamic pressure response with nitrogen 146
Fig. 4-2-5-6. Ripple amplitude (a) absolute, (b) relative 147
Fig. 4-2-5-7. Ripple characteristics (a) period, (b) frequency 147
Fig. 4-2-5-8. Dynamic pressure response with helium 148
Fig. 4-2-6-1. Principle of volume expansion method of two stages. 151
Fig. 4-2-6-2. Schematic diagram of multi-stage vacuum chamber for volume expansion system. 152
Fig. 4-2-6-3. Block diagram 153
Fig. 4-2-6-4. TB-24R relay outputs terminal board 153
Fig. 4-2-6-5. NI USB-6501 154
Fig. 4-2-6-6. Software 154
Fig. 4-2-6-7. Volume ratio r₁ 156
Fig. 4-2-6-8. Volume ratio r₂ 156
Fig. 4-2-6-9. Volume ratio r₃ 157
Fig. 4-2-6-10. Volume ratio r₄ 157
Fig. 4-2-7-1. Result of repeatability test for 5 g 161
Fig. 4-2-7-2. Result of repeatability test for 10 g 161
Fig. 4-2-7-3. Result of repeatability test for 20 161
Fig. 4-2-7-4. Micro balance 161
Fig. 4-2-7-5. Water level 162
Fig. 4-2-7-6. Immersion depth deviation at 5 ul 162
Fig. 4-2-7-7. Immersion depth deviation at 50 ul 163
Fig. 4-2-7-8. Immersion depth deviation at 500 ul 163
Fig. 4-2-7-9. Result of evaporation experiment 164
Fig. 4-2-7-10. Evaporation trap 164
Fig. 4-2-7-11. Micro pipet (10ul, 100 ul, 1000 ul) 165
Fig. 4-3-3-1. Variations of the climatic conditions at the laboratory over the measurement period 169
Fig. 4-3-3-2. Loading schedule for the measurement of sensitivities of the 1000 N m-capacity torque transfer standards 170
Fig. 4-3-3-3. Deflection variations before and after correction for the temperature and humidity effects of the (a) GTM torque transfer standard and (b) HBM torque transfer standard 172
Fig. 4-4-2-1. Typical example of transfer standards 175
Fig. 5-2-1-1. (a) The isothermal bath for acoustic gas thermometer built in this study (b) Temperature stability of the bath near 90 ℃ 189
Fig. 5-2-1-2. (a) Design of the pressure chamber and isothermal shield for acoustic gas thermometer (b) pressure chamber and isothermal shield built in this study. 190
Fig. 5-2-1-3. Acoustic gas thermometer installed in the isothermal liquid bath. 191
Fig. 5-2-1-4. Acoustic resonance of mode (0, 3) when the pressure is 157.1 kPa and the temperature is 40 ℃. 191
Fig. 5-2-1-5. Result of the molar mass measurement for NPL and NIM argon samples. 193
Fig. 5-2-2-1. Experimental load for the measurement of the triple point temperature of the sealed Ne-20 and Ne-22 cell 196
Fig. 5-2-2-2. Measured resistance of the SPRT at the Ne-22 triple point state. 196
Fig. 5-2-2-3. Consecutive realization of the freezing of the Ne-22 and Ne-20. 197
Fig. 5-2-2-4. Ne-20 and Ne-22 source gas used in this work. 198
Fig. 5-2-2-5. Isotopic composition dependence of the temperature of the triple point of neon 200
Fig. 5-2-3-1. Temperature of the triple point of xenon in the International Temperature Scale of 1990. 202
Fig. 5-2-3-2. Modified gas handling system for higher purity gas inlet and better 203
Fig. 5-2-3-3. (a) Supercooling curve for Xe (b) triple point of Xe realized by adiabatic method using pulse heating. 205
Fig. 5-2-4-1. Schematic of the pressure controlled LHP 210
Fig. 5-2-4-2. Thermodynamic operation curve (P-T diagram) of a conventional loop heat pipe and its change when the compensation chamber pressure is increased 211
Fig. 5-2-4-3. Thermodynamic operation curve (P-T diagram) for the compensation chamber pressure decrease. 212
Fig. 5-2-4-4. External and section views of the isothermal region (dimensions in mm). 215
Fig. 5-2-4-5. External and section views of the evaporator-wick-compensation chamber assembly(dimensions in mm). 216
Fig. 5-2-4-6. External view of the pressure controlled LHP(dimensions in mm). 217
Fig. 5-2-4-7. Schematic of the experimental apparatus. 218
Fig. 5-2-4-8. Start-up behavior of the pressure controlled LHP with no control gas injection. Abbreviations refer to the temperatures of various components. 219
Fig. 5-2-4-9. Stability change in the isothermal region temperature when the compensation chamber pressure was controlled. 220
Fig. 5-2-4-10. Response of the isothermal region temperature to the control gas pressure increase. 221
Fig. 5-2-4-11. Instability when the control gas pressure was increased by 700 Pa. Abbreviations refer to the temperatures of various components. 222
Fig. 5-2-4-12. Response of the isothermal region temperature to the large control gas pressure increase. 223
Fig. 5-2-4-13. Response of the isothermal region temperature to the control gas pressure decrease. 224
Fig. 5-2-4-14. Transient responses of the measured component temperatures to the control gas pressure decreases from 2 kPa to 20 kPa. 224
Fig. 5-2-4-15. Typical example of the hydraulic operating temperature control of the pressure controlled LHP. 225
Fig. 5-2-4-16. Temperature uniformity of the isothermal region at the different control gas pressures. 226
Fig. 5-2-4-17. Isothermal region temperature decrease during Sn supercool due to the control gas pressure decrease. 228
Fig. 5-2-4-18. Resistance ratio variation of an SPRT inserted in the Sn FP cell during Sn supercool. 228
Fig. 5-2-4-19. Isothermal region temperature and control gas pressure stability during Sn freezing. 229
Fig. 5-2-4-20. Measured Sn freezing curve during hydraulic isothermal region temperature control. 230
Fig. 5-2-4-21. External view and dimensions of the transfer chamber. 231
Fig. 5-2-4-22. Schematic of the alkali metal working fluid injection apparatus. 232
Fig. 5-2-4-23. Start-up behavior of the K(potassium) LHP 233
Fig. 5-2-5-1. Schematic diagram of thermal wave method. 240
Fig. 5-2-5-2. Photograph of thermal wave method a part of optical and temperature detection system. 240
Fig. 5-2-5-3. Graphite heat spreader sheet for electronics devices. 241
Fig. 5-2-5-4. The signal of thermal wave system is frequency vs. phase and length vs. phase. 241
Fig. 5-2-5-5. Diagram of thermal diffisivity of cross-plane/In-plane. 242
Fig. 5-2-5-6. The small area focusing by optical fiber. 242
Fig. 5-2-5-7. The signal of Cross-plane and In-plane method. 242
Fig. 5-2-5-8. Thermoreflectance system by the pump laser and probe laser. 243
Fig. 5-2-5-9. The beam pattern of probe laser and pump laser. 244
Fig. 5-2-5-10. The shape of the pump laser pulse. 244
Fig. 5-2-5-11. Photograph of thermoreflectance signal. 245
Fig. 5-2-5-12. The in-plane thermal measurement by the laser flash system and the sample holder(from NETZSCH). 246
Fig. 5-2-5-13. The typical temperature rise curve for in-plane thermal measurement system. 246
Fig. 5-2-5-14. The intrinsic thermal diffusivity by Akoshim. 246
Fig. 5-2-5-15. The thermal diffusivity of IG 110 (Upper: Cross-plane, Low: In-plane). 247
Fig. 5-2-5-16. The cross-plane/In-plane thermal diffusivity of IG 110. 247
Fig. 5-3-1-1. Measured nonlinearities of different bridges at different operating conditions 255
Fig. 5-3-1-2. Difference in the resistance ratio at Ag FP 256
Fig. 5-3-1-3. Difference in the resistance ratio at TPW after Ag FP measurement 257
Fig. 5-3-1-4. Temperature difference between AC and DC measurements at Ag FP 258
Fig. 5-3-1-5. Difference in the resistance ratio at Zn FP 259
Fig. 5-3-1-6. Difference in the resistance ratio at TPW after Zn FP measurement 260
Fig. 5-3-1-7. Temperature difference between AC and DC measurements at Zn FP 260
Fig. 5-3-1-8. Difference in the resistance ratio at Hg TP 261
Fig. 5-3-1-9. Difference in the resistance ratio at TPW after Hg TP measurement 261
Fig. 5-3-1-10. Temperature difference between AC and DC measurements at Hg TP 262
Fig. 5-3-1-11. Temperature difference between 30 Hz AC and DC measurements at Ag FP, Zn FP, and Hg TP 263
Fig. 5-3-1-12. Temperature difference between 90 Hz AC and DC measurements at Ag FP, Zn FP, and Hg TP 263
Fig. 5-3-2-1. External and section views of the reference Ag FP cell 266
Fig. 5-3-2-2. External and section views of the new Ag FP cell 266
Fig. 5-3-2-3. Sealing structure of the new Ag FP cell 266
Fig. 5-3-2-4. Freezing curve of the Ag-O-2012-1 cell 269
Fig. 5-3-2-5. Freezing curve of the Ag-O-2012-2 cell 269
Fig. 5-3-2-6. Temperature difference between the newly made Ag FP cells and the reference Ag FP cell 270
Fig. 5-3-3-1. Schematic diagram of dew point measurements. 274
Fig. 5-3-3-2. Measurement of dew point temperature as a function of time during purging depending on flow rate using dew point hygrometer (P manufacturer). 274
Fig. 5-3-3-3. Measurement of dew point temperature as a function of time during purging depending on flow rate using dew point hygrometer (A manufacturer). 275
Fig. 5-3-3-4. Measurement of dew point temperature and room temperature as a function of time during purging at flow rate of 1 l/min using dew point hygrometers(P and A manufacturers). 276
Fig. 5-3-3-5. Equilibrium dew point as a function of room temperature at flow rates of (A) 1 l/min, (B) 2 l/min, (C) 3 l/min, and (D) 4 l/min. 276
Fig. 5-3-4-1. Tian-calvet calorimeter(BT-2.15) 279
Fig. 5-3-4-2. Heat flow and temperature profile of Blank and SRM sample 280
Fig. 5-3-4-3. Specific heat of SRM720 based on blank test and SRM720 test 281
Fig. 5-3-4-4. Comparison between theoretical value and 2 experimental values of specific heat of SRM720 282
Fig. 5-3-4-5. Specific heat comparison between reference value and 4 experimental values 282
Fig. 5-3-4-6. Specific heat comparison between reference value and 4 experimental values when the sample mass is around 1980mg 283
Fig. 5-3-4-7. Correction of heat flow curve in calculating specific heat 284
Fig. 5-4-1-1. Uncertainty of KRISS in CCT-K9 comparison. 286
Fig. 5-4-3-1/Fig. 4-3-1. Difference of Zn freezing points between KRISS and SIRIM. 288
Fig. 5-4-3-2/Fig. 4-3-2. Immersion profiles for Zn freezing point cells. 288
Fig. 5-4-4-1. Temperature difference of participant of APMP.T-S6 from ARV value at 400 ℃. 289
Fig. 7-1-1-1. Traceability of capacitance standard from DC quantum Hall resistance standard. 302
Fig. 7-1-1-2. 8 : 1 Schematic diagram of 8:1 AC resistance ratio bridge. 303
Fig. 7-1-1-3. Schematic diagram of quadrature bridge. 304
Fig. 7-1-1-4. Main components of the bridge: Main transformer and inductive voltage divider (IVD). 304
Fig. 7-1-1-5. Power source for the AC resistance ratio bridge and the quadrature bridge. 305
Fig. 7-1-1-6. Simplified schematic diagram of 8 : 1 AC resistance ratio bridge. 305
Fig. 7-1-1-7. Simplified schematic diagram of the quadrature bridge. 306
Fig. 7-1-1-8. Software for the bridge operation. 307
Fig. 7-1-1-9. Photograph of an AC resistance standard of 103 kΩ and temperature stability of the temperature control system. 308
Fig. 7-1-1-10. AC-DC calculable resistance value of 1 kΩ standard resistors. 309
Fig. 7-1-1-11. Photograph of the developed quadrature bridge system: 1000 pF capacitance standards, 103 kΩ resistance standards, 8:1 AC resistance ration bridge, quadrature bridge. 309
Fig. 7-1-1-12. Calibration procedure of a capacitance standard based on the DC quantum Hall resistance standard. 310
Fig. 7-1-2-1. Impedance measurement instruments and traceability. 312
Fig. 7-1-2-2. RLC model for the 1000 pF capacitance standards. (Resistance: Ω at 10 MHz). 314
Fig. 7-1-2-3. Calculated driving point and 4TP impedance. 315
Fig. 7-1-2-4. VNA measurement setup. 316
Fig. 7-1-2-5. S-parameter of the APC to BNC adapter with the uncertainty. 317
Fig. 7-1-2-6. Measured DPI of the 1000 pF capacitance standard(Adapter compensated). 318
Fig. 7-1-2-7. Measurement model. 319
Fig. 7-1-2-8. Monte Carlo simulation results of the uncertainty from the extrapolation models. 320
Fig. 7-1-2-9. Mote Carlo simulation results of the uncertainty from the 1 kHz capacitance measurement. 321
Fig. 7-1-2-10. The traceability of the implemented calibration method. 323
Fig. 7-4-2-1. Traceability of magnetic flux density in KRISS. 326
Fig. 7-4-2-2. Block diagram of low magnetic field standard system at KRISS. 328
Fig. 7-4-2-3. Measurement set-up at NML-SIRIM. 328
Fig. 7-4-3-1. Measurement configuration with a low-thermal scanner for DC voltage reference. 332
Fig. 7-4-3-2. Evaluation of reversing error for 16-channel low-thermal scanner which is used for the DC-voltage comparison at KRISS in the frame of APMP.EM.BIPM-K11.5. 333
Fig. 7-4-4-1. Measurement results of APMP.EM.12 336
Fig. 8-2-1-1. Horn antenna gain measurement system. 350
Fig. 8-2-1-2. Radiation pattern at 18 GHz. 353
Fig. 8-2-2-1. Test setup for generation of standard electro-magnetic field strength using antenna 358
Fig. 8-2-2-2. photo of power detection unit 358
Fig. 8-2-2-3. (a) old type mast made of form (b) new mast made of epoxy glass 359
Fig. 8-2-2-4. Correction factor of electric field probe with respect to distance at 18 GHz 360
Fig. 8-2-2-5. Correction factor of electric field probe with respect to distance at 22 GHz 360
Fig. 8-2-2-6. Correction factor of electric field probe with respect to distance at 22 GHz 361
Fig. 8-2-2-7. Uncertainty due to multiple scattering between antenna and electric field probe (a) 18 GHz (b) 22 GHz (b) 26.5 GHz 362
Fig. 8-3-1-1. The microcalorimeters. 365
Fig. 8-3-1-2. Comparison of the effective efficiencies measured using the 7-mm coaxial microcalorimeter of which the water bath is filled with distilled water and with styrofoam chips. 368
Fig. 8-3-2-1. Mast for measurement of the electric field probe (a) FRP mast for antenna and electric field probe (b) Form mast (Rohacell HF31) 369
Fig. 8-3-2-2. New mast for measurement of the electric field probe 370
Fig. 8-3-2-3. Photo of new mast 370
Fig. 8-3-2-4. Scattering effect measurement setup for various mast. left - foam mast with epoxy fiber pipe, upper right - FRP mast, lower right - foam mast with carbon pipe 371
Fig. 8-3-2-5. Measurement result of the various masts. (Measured electric field is normalized to H-polarization form mast(Rohacell HF-31) 372
Fig. 9-1-1-1. Free-field correction factor: square, LS1p microphone, circle: LS2p microphone. 381
Fig. 9-1-1-2. Post processing process for the free-field reciprocity calibration. 382
Fig. 9-1-1-3. Frequency and impulse response of window functions: (a) rectangular window, (b) Tukey window, (c) Chebyshev window. 383
Fig. 9-1-1-4/Fig. 9-2-2-4. Equivalent circuit model to simulate the sensitivity of microphone. 383
Fig. 9-1-1-5. Simulated voltage ratio of the equivalent circuit of Fig. 1-1-4 with multi-path noise of 20 dB SNR. 383
Fig. 9-1-1-6. Simulated impulse response of the equivalent circuit with low pass filtering: (a) rectangular, (b) Tukey, (c) Chebshev. 384
Fig. 9-1-1-7. Simulated relative sensitivity of the equivalent circuit. 384
Fig. 9-1-1-8. Measurement set-up for the free-field reciprocity microphone calibration. 385
Fig. 9-1-1-9. Measured voltage ratio of B&K 4180 wirh the free-field reciprocity calibration system shown in Fig. 9-1-1-8. 386
Fig. 9-1-1-10. Impulse response of B&K 4180 with lowpass filter. 387
Fig. 9-1-1-11. Measured sensitivity of the microphones obtained by the low-pass filtering based time windowing method. 388
Fig. 9-1-1-12. Modified setup for the free-field calibration system by reciprocity to reduce the cross-talk. 389
Fig. 9-1-1-13. Comparison of signal and processing results measured by the previous (LEFT) and modified system (RIGHT). 390
Fig. 9-1-1-14. Calibration result of magnitude and phase for LS2p microphone(B&K 4180). 391
Fig. 9-1-1-15. Setup to measure the acoustic center of microphone by using the probe microphone. 392
Fig. 9-1-1-16. Measured acoustic center of LS2p microphone. 393
Fig. 9-1-1-17. Measured sum of acoustic centers: dash line, before reflection removal; solid line, after reflection removal. 393
Fig. 9-1-1-18. Measured acoustic centers with reflection removal. 394
Fig. 9-2-1-1. Commercial bone-vibrometer 397
Fig. 9-2-1-2. Schematic diagram of audiometry calibration system for bone-conduction response 398
Fig. 9-2-1-3. An audiometer and An artificial mastoid 398
Fig. 9-2-2-1. Flow rate range of KOLAS accredited laboratories 404
Fig. 9-2-2-2. Flow rate range of national metrology institutes 404
Fig. 9-2-2-3. Schematic diagrams of the WFSS 407
Fig. 9-2-2-4. Drawings of the WFSS 408
Fig. 9-2-2-5. Constructing processes of the WFSS 409
Fig. 9-2-2-6. WFSS after finishing the construction processes 409
Fig. 9-2-2-7. Calibration result of the weigh-bridges of WFSS 1, WFSS 2 and WFSS 3 410
Fig. 9-2-2-8. Calibration result of the flow diverter of WFSS 2 (5t) 411
Fig. 9-2-2-9. Calibration result of the flow diverter of WFSS 3 (1t) 411
Fig. 9-2-2-10. Calibration result of the flow diverter of WFSS 4 (0.1t) 411
Fig. 9-2-2-11. Estimated CMC as a function of volume flow rate 415
Fig. 9-2-3-1. Schematic diagram of the three measurement configurations used for a reciprocity calibration and a fourth used for a reciprocity check. 417
Fig. 9-2-3-2. Water tank used in experiment (2.5 × 2 × 1.96 m) and clamp for hydrophone mounting. 418
Fig. 9-2-3-3. Block diagram for the sensitivity measurement of hydrophone using free-field reciprocity. 419
Fig. 9-2-3-4. Electrical diagram and outline dimensions of RESON TC-4034. 421
Fig. 9-2-3-5. (a) Side view and (b) top view of the triangular holder to mount three hydrophones with constant distance. 421
Fig. 9-2-3-6. Example of transmitting and receiving signals in pulse mode. 422
Fig. 9-2-3-7. Concept of measurement of voltage using sine and cosine component of transient signal 422
Fig. 9-2-3-8. Interpolation of starting or ending points of 1 period sampled transient signal 423
Fig. 9-2-3-9. Measured sensitivities of hydrophone RESON TC-4034 and the uncertainty evaluated based upon the developed uncertainty model 426
Fig. 9-2-3-10. Four-month-history of measured sensitivities of RESON TC-4034 hydrophone with the serial number of 0312032. 428
Fig. 9-2-3-11. Four-month-history of evaluated uncertainties of RESON TC-4034 hydrophone with the serial number of 0312032. 428
Fig. 9-3-1-1. Schematic diagram of KRISS high pressure flow standard system 430
Fig. 9-3-1-2/Fig. 9-3-1-3. Change of pressure and temperature for flow in a sonic nozzle 431
Fig. 9-3-1-3. Temperature distribution of gas and water in pipe 431
Fig. 9-3-1-4. Numbers and lengths of pipes in heat exchanger 433
Fig. 9-3-1-5. Parameters of baffle design 434
Fig. 9-3-1-6. Drawing for the design of heat exchanger 434
Fig. 9-3-1-7. Drawing for the layout of temperature control system 435
Fig. 9-3-1-8. Drawing for the layout of temperature control system at KRISS high pressure gas flow standard system 436
Fig. 9-3-1-9. Photographs for temperature control system 436
Fig. 9-3-1-10. Change of temperature and pressure with heat exchanger at 1,200 ㎥/h and non-heating 437
Fig. 9-3-1-11. Change of temperature and pressure with heat exchanger at 6,500 ㎥/h and non-heating 438
Fig. 9-3-1-12. Change of temperature and pressure with heat exchanger at 1,200 ㎥/h and heating off/23℃/25℃ 439
Fig. 9-3-1-13. Change of temperature and pressure with heat exchanger at 6,500 ㎥/h and heating off/23℃/25℃ 440
Fig. 9-3-2-1. Configuration of the underwater radiation noise from offshore wind farm. 443
Fig. 9-3-2-2. Method of image to find Green function G(x, x') under ocean environment. 445
Fig. 9-3-2-3. Diagram illustrating Snell's law. 446
Fig. 9-3-2-4. Pressure field formed by a point noise source. 447
Fig. 9-3-2-5. Geometry of a circular cylinder surrounded by liquid. 448
Fig. 9-3-2-6. Phase speeds of the first a few eigenmodes in the cylindrical tube surrounded by water. 451
Fig. 9-3-2-7. External impulse applied to the inner wall of the cylinder. 452
Fig. 9-3-2-8. Calculated noise field around the cylinder if 1 Pa of line source is applied to the inner wall of the cylinder at Θ=0. 453
Fig. 9-3-3-1. Similarity of the fluid flow and acoustic wave. 454
Fig. 9-3-3-2/Fig. 9-3-3-1. Basic concept for LDA measurement. 455
Fig. 9-3-3-3/Fig. 9-3-3-2. The acousto-optical LDA configuration for 1D duct measurement. 456
Fig. 9-3-3-4/Fig. 9-3-3-3. Basic configuration of LDA with Bragg cell. 456
Fig. 9-3-3-5/Fig. 9-3-3-4. The experimental system for the sound measurement by LDA based approach. 457
Fig. 9-3-3-6/Fig. 9-3-3-5. The experimental system for the sound measurement by LDA based approach: (a) LAUM, CNRS, (b) Acosutics group, NPL. 457
Fig. 9-3-3-7/Fig. 9-3-3-6. The experimental system for the sound measurement by LaserVibrometer and measured sound field. 458
Fig. 9-3-3-8/Fig. 9-3-3-7. The example of the experimental system for the sound measurementby PIV. 458
Fig. 9-3-4-1. Applications for MEMS in automobiles (WTC, www.wtc-consult.de). 460
Fig. 9-3-4-2. Applications for MEMS in Smart Mobile Device. 460
Fig. 9-3-4-3. Top 10 buyers of consumer and mobile MEMS devices (IHS iSuppli Research, 2012). 460
Fig. 9-3-4-4. Global MEMS market for automotive inertial sensor market. 461
Fig. 9-3-4-5. Global MEMS market for mobile phones and tablet computers.(Source: Yole Developpement, July 2013). 461
Fig. 9-4-1-1. Relationship to the KCRV. 464
Fig. 9-4-2-1. Transfer standards for CCM.FF-K2.1.2011 466
Fig. 9-4-2-2. Preliminary results for CCM.FF-K2.1.2011 467
Fig. 9-4-3-1. Complex voltage sensitivity of the PTB working standard (Jewell, type ASMP-200, SN 50563). 468
Fig. 9-4-3-2. Complex charge sensitivity of the KRISS working standard (B&K, type 4381-ROT, SN 30001). 469