[표제지 등]
Abstract
그림목차
표목차
칼라
목차
PART I. 이온빔표면분석법 13
제1장 서론 15
제2장 본론 18
제1절 다목적 진공표적함의 설계 및 제작 18
1. 진공표적함 20
2. 진공계통 22
3. TOF spectrometer 22
4. target manipulator 25
가. target holder 25
나. target manipulator 27
제2절 데이터 수집시스템 및 분석 컴퓨터 프로그램 32
1. 데이터수집시스템의 개선 32
2. 분석 컴퓨터 프로그램 37
제3절 분석 시스템의 최적화 41
1. ERD-TOF 시스템의 최적화 41
가. 질량분해능 41
나. 깊이분해능 44
다. 분석가능 깊이 46
라. 분석감도 48
마. 최적화 49
2. HIRBS 시스템의 최적화 53
가. 질량분해능 53
나. 깊이분해능 55
다. 최적화 57
제4절 실제 시료에의 적용 61
제3장 결론 69
참고문헌 70
PART II. 레이저유도 플라즈마분광법 71
I. 서론 73
II. 본론 76
제1절 LIPS의 기본 원리 76
제2절 플라즈마 생성에 영향을 미치는 인자 78
1. 레이저에 의한 영향 78
가. 레이저 파장 78
나. 레이저에너지의 영향 78
제3절 플라즈마 온도 81
제4절 장치 및 실험 84
1. 플라즈마 분광장치 84
2. 신호처리장치 84
3. 플라즈마 발생 실험 85
4. 플라즈마 온도 측정 85
5. LIPS에 의한 원소분포조사 실험 87
제5절 결과 및 논의 88
1. 플라즈마의 특성 88
가. Time resolved LIPS 88
나. 플라즈마 온도 측정 92
2. 암석시료 분석 94
가. 표준시료 분석 94
나. 원소분포 분석 100
III. 결론 105
참고문헌 107
판권지 109
Table 1. Specification of the 6-axis target manipulator 29
Table 2. Summary of the optimum ERD-TOF experimental conditions for various viewpoints 50
Table 3. Optimum ERD-TOF experimental conditions for various purposes 50
Table 4. Summary of the optimum HIRBS experimental conditions for various viewpoints. 60
Table 5. Analysis results of reference and test samples 62
Table 1. Spectroscopic data of neutral Fe lines 93
Table 2. Major elements composition of standard rock samples. 96
Fig. 1. KIGAM multipurpose vacuum chamber 18
Fig.2. Collimator support 20
Fig.3. SSB detector support. 21
Fig.4. chamber vacuum controller 23
Fig.5. Modified TOF spectrometer 24
Fig.6. Modified time detector 24
Fig.7. target holder 25
Fig.8. Contour plot of the electric potential around(arround) the target holder. 27
Fig.9. Variation of the measured current as a function of the suppressor voltage 28
Fig.10. Perspective of the 6-axis target manipulator 30
Fig.11. target manipulator control system 31
Fig.12/Fig.21. Flow chart of the data analysis program DoERD 38
Fig.13. Example of the result of ERD analysis for Si in SiO₂ sample. 39
Fig.14. Example of the result of ERD analysis for Si in SiO₂ sample 40
Fig.15. Mass resolution of the TOF spectrometer as a function of the energy and mass of incident particles 42
Fig.16. Mass resolution of the TOF spectrometer as a function of the mass of the surface recoiled particles for Incident particles of 19F and 35Cl.(이미지참조) 43
Fig.17. Time deduced energy resolution of the TOF spectrometer compared with tile SSBD resolution 45
Fig.18. Surface depth resolution of the spectrometer as a function of incident particle and atomic number of the target elements. 46
Fig.19. Accessible depth of the spectrometer as a function of incident particle and atomic number of the target elements. 47
Fig.20. Detection limit of the spectrometer as a function of incident particle and atomic number of the impurity elements in the target. 49
Fig.21. The Rutherford window 54
Fig.22. Mass resolution of HIRBS as a function of target mass 55
Fig.23. Depth resolution as a function of the projectile mass(charge) for several impurities in silicon... 56
Fig.24. Surface depth resolutions HIRBS for various elements in silicon 58
Fig.25. Variation of the depth resolution of HIRBS for Au in silicon along the depth as a result of straggling effect 59
Fig.26. Scatter plot of the ERD-TOF analysis of the FSG sample 63
Fig.27. The fitted result of the FSG sample 64
Fig.28. Scatter plot of the ERD-TOF analysis of the LiAlO₂ sample 65
Fig.29. The fitted result of the LiAlO₂ sample 66
Fig.30. Scatter plot of the ERD-TOF analysis of the FSN sample 67
Fig.31. The fitted result of the FSN sample 68
Fig.1. Typical temporal history of a laser-induced plasma. L1 : first laser pulse, L2 : second laser pulse 77
Fig.2. Typical Boltzmann plot [ln(Iλ/gA) vs. energy] for (A) Cu(I) spectral lines and (B) Pb(I) spectral lines. 83
Fig.3. Schematic diagram of the LIPS experimental setup. 86
Fig.4. Spectra of a Cu plate sample taken at different delay times after the impact of the laser pulse. 90
Fig.5. Spectra of the rock sample with different delay time after the impact of the laser pulse. 91
Fig.6. Spectra of the rock sample with different gate width time after the impact of the laser pulse. 91
Fig.7. Boltzmann plot obtained in air at atmospheric pressure. 93
Fig.8. Calibration curves of Ba and Cu in standard rock samples 97
Fig.9. Calibration curves of Fe and Mn in standard rock samples 98
Fig.10. Calibration curves of Si and Sr in standard rock samples 99
Fig.11. Elements distribution patterns of Ba, Pb, Sr, Fe on a polished granite rock section. 101
Fig.12. Elements distribution patterns of Ba, Pb, Sr on a sliced Rock section. 102
Fig.13. Elemental distribution patterns of Cu, Fe, Mn and Sr on a polished Mn noudle. 103
Fig.14. Elements distribution patterns of Cu, Fe, Mn and Si on a polished Mn-nodule section. 104