표제지
목차
국문요약 8
ABSTRACT 10
I. 서론 12
1. 연구 배경 12
2. 연구 목적 15
II. 이론 19
1. CMP 공정의 개요 19
1) CMP 공정 19
2) CMP 공정변수 24
2. STI(Shallow Trench Isolation) 공정 29
III. 실험 31
1. 실험방법 31
1) SHS(Supercritical Hydrothermal Synthesis) 31
2) 실험조건 34
2. 측정장비 36
3. 평가항목 40
IV. 결과 및 고찰 41
1. pH 농도변화에 따른 실험결과 41
2. 도핑제 농도변화에 따른 실험결과 50
3. 균일도에 대한 실험결과 52
V. 결론 55
VI. 참고문헌 57
Table 1. CMP experimental conditions 39
Table 2. Comparison of average particle size on TEM image and particle size measured by Ceria main peak by XRD according to pH modifier NH₃ addition ratio 48
Fig. 1. Schematic of selectivity 14
Fig. 2. Image of the structure of 3D NAND Flash 14
Fig. 3. Schematic of Thesis flow 16
Fig. 4. Image of various planarization process 17
Fig. 5. Image of Scratch on Wafer 18
Fig. 6. Images without CMP and with CMP 21
Fig. 7. Schematic of CMP Process applied depending on the purpose 21
Fig. 8. Schematic diagram of CMP Process 22
Fig. 9. Schematic of CMP Process flow with Ceria slurry 23
Fig. 10. Zeta potential of Ceria and Silica 26
Fig. 11. Schematic diagram of Zeta potential 27
Fig. 12. Schematic diagram of STI Process 30
Fig. 13. Schematic diagram of Supercritical Hydrothermal Synthesis 32
Fig. 14. Image of Critical point 33
Fig. 15. Schematic diagram of the experimental process of supercritical hydrothermal synthesis 35
Fig. 16. CTS 社 AP-300 37
Fig. 17. Rigaku 社 SmartLab SE XRD 37
Fig. 18. PHILIPS 社 TEM 38
Fig. 19. Nanometrix 社 Atlas series 38
Fig. 20. XRD Image of pH concentration 1:0 condition 42
Fig. 21. XRD Image of pH concentration 1:1 condition 42
Fig. 22. XRD Image of pH concentration 1:2 condition 43
Fig. 23. XRD Image of pH concentration 1:3 condition 43
Fig. 24. XRD Image of pH concentration 1:4 condition 44
Fig. 25. Image of ceria powder particle size depending on pH concentration 45
Fig. 26. TEM image of pH concentration 1:0 condition 46
Fig. 27. TEM image of pH concentration 1:1 condition 46
Fig. 28. TEM image of pH concentration 1:2 condition 46
Fig. 29. TEM image of pH concentration 1:3 condition 46
Fig. 30. TEM image of pH concentration 1:4 condition 47
Fig. 31. Image of Ceria powder dried after supercritical hydrothermal synthesis 49
Fig. 32. Removal rate with increasing doping agent concentration in slurry 51
Fig. 33. TEM image of 20 nm Ceria particles synthesized by supercritical hydrothermal synthesis 53
Fig. 34. TEM image of 30 nm Ceria particles synthesized by hydrothermal synthesis 53
Fig. 35. Comparison of Particle Uniformity of Supercritical Hydrothermal Synthesis and Hydrothermal Synthesis 54